Semicera provides wafer boats, holder, and custom wafer carriers for vertical/column and horizontal configurations. Advanced ceramics provide excellent heat resistance and plasma durability, while reducing particles and pollutants. Semiconductor grade silicon carbide (SiC) also provides high-temperature strength for high-capacity wafer carriers.
Introducing our state-of-the-art Silicon Carbide Horizontal Boat Plate, meticulously designed for the semiconductor industry’s wafer processing applications. Crafted from the finest silicon carbide, our horizontal boat plate stands out for its superior thermal properties, chemical resistance, and mechanical strength. Ideal for high-temperature processes, this boat plate is engineered to deliver exceptional performance, ensuring precision and efficiency in every use.
Exceptional Durability: Made from high-purity silicon carbide, our boat plate is engineered to withstand extreme temperatures up to 1600°C, offering unparalleled durability and lifespan.
Uniform Heat Distribution: The thermal conductivity of silicon carbide ensures even heat distribution across the plate, critical for maintaining process consistency and achieving high-quality wafer production.
Chemical Resistance: Resistant to corrosive chemicals and harsh environments, our boat plate maintains integrity and performance, even in the most demanding semiconductor processing applications.
High Mechanical Strength: The robust construction of our boat plate guarantees excellent mechanical strength and wear resistance, reducing the risk of damage and the need for frequent replacements.
Applications:
Our Silicon Carbide Horizontal Boat Plate is perfect for a wide range of high-temperature processes in semiconductor manufacturing, including but not limited to diffusion, oxidation, ion implantation, and CVD processes. Its design and materials ensure it can support the precise requirements of wafer processing, making it an essential component for semiconductor production lines.
