Semicera is a professional supplier of advanced ceramic and coated graphite components for semiconductor equipment. Our SiC-coated graphite parts for SiC epitaxial equipment are designed for use in the reaction chamber of SiC epitaxy systems, providing stable performance in high-temperature and corrosive process environments.
These parts are made from high-purity graphite with a silicon carbide (SiC) coating, which improves surface hardness, oxidation resistance, and particle control, ensuring long service life and stable process conditions.
Semicera is a professional supplier of advanced coated graphite components for semiconductor equipment. Our SiC Coated Graphite Halfmoon Part is a key structural component used in SiC epitaxial equipment and other high-temperature semiconductor process chambers.
Using advanced coating technology, the product is manufactured with high-purity graphite as the base material and a uniform silicon carbide (SiC) coating on the surface. This ensures excellent stability, long service life, and reliable performance in harsh process environments.
The half-moon design is mainly used inside the reaction chamber to support process stability and help maintain uniform thermal and gas flow conditions. It does not come into direct contact with the wafer.
