Semicera Energy Technology Co., Ltd. is a supplier of advanced semiconductor ceramic components. Our main products include silicon carbide etched discs, silicon carbide boat carriers, silicon carbide wafer carriers (PV & semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chucks, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.
These products are widely used in the semiconductor and photovoltaic industries, including crystal growth, epitaxy, etching, packaging, coating, and diffusion furnace equipment applications.
Semicera provides CVD SiC coating services on graphite, ceramics, and other substrate materials. In the process, silicon- and carbon-containing precursor gases react at high temperature to form high-purity SiC species, which are deposited onto the surface of the substrate to create a dense and uniform SiC protective layer.
1. High temperature oxidation resistance: the oxidation resistance is still very good when the temperature is as high as 1600 C.
2. High purity: made by chemical vapor deposition under high-temperature chlorination conditions.
3. Erosion resistance: high hardness, compact surface, fine particles.
4. Corrosion resistance: acid, alkali, salt, and organic reagents.
| SiC-CVD Properties | ||
| Crystal Structure | FCC β phase | |
| Density | g/cm ³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Grain Size | μm | 2~10 |
| Chemical Purity | % | 99.99995 |
| Heat Capacity | J·kg-1 ·K-1 | 640 |
| Sublimation Temperature | ℃ | 2700 |
| Felexural Strength | MPa (RT 4-point) | 415 |
| Young’s modulus | Gpa (4pt bend, 1300℃) | 430 |
| Thermal Expansion (C.T.E) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
