Casete semiconductor

Semiconductor Cassette– Protect and transport your wafers with precision using Semicera’s Semiconductor Cassette, designed to ensure optimal safety and efficiency in high-tech manufacturing environments.

Semicera introduces the Casete semiconductor, an essential tool for the secure and efficient handling of wafers throughout the semiconductor manufacturing process. Engineered with high precision, this cassette ensures that your wafers are safely stored and transported, maintaining their integrity at every stage.

Superior Protection and Durability The Casete semiconductor from Semicera is built to offer maximum protection to your wafers. Constructed from robust, contamination-resistant materials, it shields your wafers from potential damage and contamination, making it an ideal choice for cleanroom environments. The cassette’s design minimizes particulate generation and ensures that wafers remain untouched and secure during handling and transportation.

Enhanced Design for Optimal Performance Semicera’s Casete semiconductor features a meticulously engineered design that provides precise wafer alignment, reducing the risk of misalignment and mechanical damage. The cassette’s slots are perfectly spaced to hold each wafer securely, preventing any movement that could result in scratches or other imperfections.

Versatility and Compatibility The Casete semiconductor is versatile and compatible with various wafer sizes, making it suitable for different stages of semiconductor fabrication. Whether you’re working with standard or custom wafer dimensions, this cassette adapts to your needs, offering flexibility in your manufacturing processes.

Streamlined Handling and Efficiency Designed with the user in mind, the Semicera Semiconductor Cassette is lightweight and easy to handle, allowing for quick and efficient loading and unloading. This ergonomic design not only saves time but also reduces the risk of human error, ensuring smooth operations within your facility.

Meeting Industry Standards Semicera ensures that the Casete semiconductor meets the highest industry standards for quality and reliability. Each cassette undergoes rigorous testing to guarantee that it performs consistently under the demanding conditions of semiconductor manufacturing. This dedication to quality ensures that your wafers are always protected, maintaining the high standards required in the industry.

Elementos

Producción

Investigación

Ficticio

Parámetros de cristal

Politito

4H

Error de orientación de la superficie

4±0.15°

Parámetros eléctricos

Dopante

nitrógeno de tipo N

Resistividad

0.015-0.025ohm · cm

Parámetros mecánicos

Diámetro

150.0 ± 0.2 mm

Espesor

350 ± 25 µm

Orientación plana primaria

[1-100]±5°

Longitud plana primaria

47.5 ± 1.5 mm

Plano secundario

Ninguno

TTV

≤5 µm

≤10 µm

≤15 µm

LTV

≤3 μm (5 mm*5 mm)

≤5 μm (5 mm*5 mm)

≤10 μm (5 mm*5 mm)

Arco

-15 μm ~ 15 μm

-35 μm ~ 35 μm

-45 μm ~ 45 μm

Urdimbre

≤35 µm

≤45 µm

≤55 µm

Rugosidad delantera (SI-FACE) (AFM)

RA≤0.2Nm (5 μm*5 μm)

Estructura

Densidad de micropipe

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Impurezas de metal

≤5E10atoms/cm2

N / A

BPD

≤1500 ea/cm2

≤3000 ea/cm2

N / A

TSD

≤500 ea/cm2

≤1000 ea/cm2

N / A

Calidad frontal

Frente

Si

Acabado superficial

SI-FACE CMP

Partículas

≤60ea/oblea (tamaño ≥0.3 μm)

N / A

Arañazos

≤5ea/mm. Longitud acumulativa ≤diameter

Longitud acumulativa ≤2*diámetro

N / A

Peel de naranja/pits/manchas/estrías/grietas/contaminación

Ninguno

N / A

Chips de borde/sangría/placas hexagonales

Ninguno

Áreas de politype

Ninguno

Área acumulada ≤20%

Área acumulada ≤30%

Marcado láser delantero

Ninguno

Calidad espalda

Final

CMP C-FACE

Arañazos

≤5EA/mm, longitud acumulativa ≤2*diámetro

N / A

Defectos posteriores (chips/muescas de borde)

Ninguno

Rugosidad

RA≤0.2Nm (5 μm*5 μm)

Marcado láser de espalda

1 mm (desde el borde superior)

Borde

Borde

Chaflán

Embalaje

Embalaje

Lista de EPI con embalaje de vacío

Embalaje de cassette de múltiples obras

*Notas: "NA" significa que ningún elemento de solicitud no mencionado puede referirse a SEMI-STD.

tech_1_2_size

Obleas de sic

Nuevo

Esperamos su contacto con nosotros