6 Inch Semi-Insulating HPSI SiC Wafer

Semicera’s 6 Inch Semi-Insulating HPSI SiC Wafers are engineered for maximum efficiency and reliability in high-performance electronics. These wafers feature excellent thermal and electrical properties, making them ideal for a variety of applications, including power devices and high-frequency electronics. Choose Semicera for superior quality and innovation.

Semicera’s 6 Inch Semi-Insulating HPSI SiC Wafers are designed to meet the rigorous demands of modern semiconductor technology. With exceptional purity and consistency, these wafers serve as a reliable foundation for developing high-efficiency electronic components.

These HPSI SiC wafers are known for their outstanding thermal conductivity and electrical insulation, which are critical for optimizing the performance of power devices and high-frequency circuits. The semi-insulating properties help in minimizing electrical interference and maximizing device efficiency.

The high-quality manufacturing process employed by Semicera ensures that each wafer has uniform thickness and minimal surface defects. This precision is essential for advanced applications such as radio frequency devices, power inverters, and LED systems, where performance and durability are key factors.

By leveraging state-of-the-art production techniques, Semicera provides wafers that not only meet but exceed industry standards. The 6-inch size offers flexibility in scaling up production, catering to both research and commercial applications in the semiconductor sector.

Choosing Semicera’s 6 Inch Semi-Insulating HPSI SiC Wafers means investing in a product that delivers consistent quality and performance. These wafers are part of Semicera’s commitment to advancing the capabilities of semiconductor technology through innovative materials and meticulous craftsmanship.

Elementos

Producción

Investigación

Ficticio

Parámetros de cristal

Politito

4H

Error de orientación de la superficie

4±0.15°

Parámetros eléctricos

Dopante

nitrógeno de tipo N

Resistividad

0.015-0.025ohm · cm

Parámetros mecánicos

Diámetro

150.0 ± 0.2 mm

Espesor

350 ± 25 µm

Orientación plana primaria

[1-100]±5°

Longitud plana primaria

47.5 ± 1.5 mm

Plano secundario

Ninguno

TTV

≤5 µm

≤10 µm

≤15 µm

LTV

≤3 μm (5 mm*5 mm)

≤5 μm (5 mm*5 mm)

≤10 μm (5 mm*5 mm)

Arco

-15 μm ~ 15 μm

-35 μm ~ 35 μm

-45 μm ~ 45 μm

Urdimbre

≤35 µm

≤45 µm

≤55 µm

Rugosidad delantera (SI-FACE) (AFM)

RA≤0.2Nm (5 μm*5 μm)

Estructura

Densidad de micropipe

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Impurezas de metal

≤5E10atoms/cm2

N / A

BPD

≤1500 ea/cm2

≤3000 ea/cm2

N / A

TSD

≤500 ea/cm2

≤1000 ea/cm2

N / A

Calidad frontal

Frente

Si

Acabado superficial

SI-FACE CMP

Partículas

≤60ea/oblea (tamaño ≥0.3 μm)

N / A

Arañazos

≤5ea/mm. Longitud acumulativa ≤diameter

Longitud acumulativa ≤2*diámetro

N / A

Peel de naranja/pits/manchas/estrías/grietas/contaminación

Ninguno

N / A

Chips de borde/sangría/placas hexagonales

Ninguno

Áreas de politype

Ninguno

Área acumulada ≤20%

Área acumulada ≤30%

Marcado láser delantero

Ninguno

Calidad espalda

Final

CMP C-FACE

Arañazos

≤5EA/mm, longitud acumulativa ≤2*diámetro

N / A

Defectos posteriores (chips/muescas de borde)

Ninguno

Rugosidad

RA≤0.2Nm (5 μm*5 μm)

Marcado láser de espalda

1 mm (desde el borde superior)

Borde

Borde

Chaflán

Embalaje

Embalaje

Lista de EPI con embalaje de vacío

Embalaje de cassette de múltiples obras

*Notas: "NA" significa que ningún elemento de solicitud no mencionado puede referirse a SEMI-STD.

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Obleas de sic

Nuevo

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