High-Purity Custom Silicon Carbide Furnace Tube

Semicera provides customizable high-purity silicon carbide (SiC) furnace tubes designed for high-temperature semiconductor and industrial thermal processes. The tubes are manufactured with advanced SiC materials, offering excellent thermal stability, high mechanical strength, and outstanding resistance to corrosion and oxidation.

With precise machining capability, the furnace tubes can be customized according to customer drawings in terms of size, structure, and performance requirements, ensuring compatibility with different furnace systems.

Description

Semicera provides stable and high-quality silicon carbide crystal boats, silicon carbide paddles, and silicon carbide furnace tubes for the 4-inch to 6-inch semiconductor wafer industry. The material purity can reach up to 99.9%, helping ensure a clean process environment without wafer contamination.

These SiC components are widely used in high-temperature furnace processes due to their excellent thermal stability, high strength, and resistance to chemical corrosion.

碳化硅炉管-SIC tubes1

Application

  • LTO (Low Temperature Oxide)
  • SIPOS (Silicon Polyoxide)
  • Si₃N₄ (Silicon Nitride deposition)
  • PSG (Phosphosilicate Glass)
  • POLY (Polysilicon film growth)

碳化硅炉管-SIC tubes2                碳化硅炉管-SIC tubes3

In these processes, raw materials in gas or vapor form are activated by heat and deposited as a thin solid film on the wafer surface.

Low-pressure chemical vapor deposition (LPCVD) is typically carried out under reduced pressure. This improves gas diffusion, resulting in better film uniformity. It also allows vertical wafer loading and higher batch capacity, making it suitable for large-scale production of integrated circuits, power devices, optoelectronics, and optical fiber applications.

ADFvZCVXCD

Semicera

Semicera Energy Technology Co., Ltd. is a professional manufacturer engaged in the R&D, production, and sales of silicon carbide (SiC) ceramic products.

Since its establishment in 2016, Semicera has developed strong capabilities in ceramic forming and manufacturing processes, including isostatic pressing, dry pressing, slip casting, and vacuum extrusion molding.

The company operates multiple silicon carbide ceramic sintering production lines and is equipped with advanced machining facilities, including CNC machining centers and precision grinding machines, ensuring stable quality and high-precision processing.

In addition to silicon carbide sintered components, Semicera also provides machining and manufacturing services for a wide range of advanced ceramics, including:

  • Silicon carbide (SiC) ceramics
  • Alumina (Al₂O₃) ceramics
  • Aluminum nitride (AlN) ceramics
  • Zirconia (ZrO₂) ceramics

We are committed to providing reliable quality, precise machining, and long-term supply solutions for semiconductor and high-temperature industrial applications.

Newletter

Looking forward to your contact with us