The Semicera’s High-Purity CVD SiC Coated Graphite Wafer Carrier Susceptor is designed for semiconductor high-temperature processes such as MOCVD, CVD, and epitaxial growth. It is manufactured using high-purity graphite as the base material, with a dense silicon carbide (SiC) coating deposited via chemical vapor deposition (CVD).
The SiC coating provides excellent protection against oxidation, chemical corrosion, and particle contamination, significantly improving service life and process stability under harsh thermal environments.
This product ensures stable wafer support, uniform heat transfer, and high-temperature structural integrity, making it suitable for advanced semiconductor and LED manufacturing processes.
Silicon carbide (SiC) ceramics exhibit excellent mechanical properties at room temperature, including high strength, high hardness, and a high elastic modulus. They also provide outstanding high-temperature performance, such as high thermal conductivity, low thermal expansion coefficient, and excellent specific stiffness, along with good machinability for precision optical and structural applications.
Due to this unique combination of properties, SiC ceramics are particularly suitable for precision components used in integrated circuit manufacturing equipment, including lithography systems. Typical applications include SiC carriers/susceptors, wafer boats, vacuum chucks, water-cooling plates, precision optical mirrors, gratings, and other high-precision ceramic structural parts used in semiconductor processing equipment.
Semicera can provide customers with customized wafer carriers of silicon and silicon carbide materials to meet different applications.
| Propiedad | Valor |
| Densidad | 3.21 g/cc |
| Specific heat | 0.66 J/g °K |
| Resistencia a la flexión | 450 MPa560 MPa |
| Fracture toughness | 2.94 MPa m1/2 |
| Dureza | 2800 |
| Elastic ModulusYoung’s Modulus | 450 GPa430 GPa |
| Grain size | 2 – 10 µm |
Semicera Semiconductor is a supplier of advanced semiconductor ceramic components, providing high-performance materials and precision parts for semiconductor and photovoltaic applications. The company has capabilities in high-purity silicon carbide ceramics, including recrystallized silicon carbide (R-SiC), as well as CVD silicon carbide (SiC) coatings.
In addition, Semicera also works with a range of advanced technical ceramics, such as alumina (Al₂O₃), aluminum nitride (AlN), zirconia (ZrO₂), and silicon nitride (Si₃N₄), to meet diverse application requirements.
Our main products include silicon carbide etching discs, silicon carbide boat carriers, silicon carbide wafer boats (for photovoltaic and semiconductor processes), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chucks, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.
These products are widely used in semiconductor and photovoltaic manufacturing, including crystal growth, epitaxial deposition, etching, packaging, coating processes, and diffusion furnace systems.
