TaC coating is a new generation of high temperature resistant material, with better high temperature stability than SiC, as a corrosion resistant coating, oxidation resistant coating, wear resistant coating, can be used in the environment above 2000℃, widely used in aerospace ultra-high temperature hot end parts, the third generation of semiconductor single crystal growth and other fields.
Semicera proporciona recubrimientos especializados de carburo tantalum (TAC) para varios componentes y portadores. Semicera Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Susceptor TAC recubierto de grafito), y extendiendo la vida útil de los componentes clave del reactor. El uso del recubrimiento TAC TAC Tantalum es resolver el problema del borde y mejorar la calidad del crecimiento de los cristales, y las semicera han resuelto la tecnología de recubrimiento de carburo Tantalum (CVD), alcanzando el nivel avanzado internacional.
Después de años de desarrollo, Semicera ha conquistado la tecnología de CVD TAC con los esfuerzos conjuntos del departamento de I + D. Los defectos son fáciles de ocurrir en el proceso de crecimiento de las obleas SIC, pero después de usar TAC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Semicera’ parts for single crystal growth
In addition, the service life of Semicera’s TaC coating products is longer and more resistant to high temperature than that of SiC coating. After a long time of laboratory measurement data, our TaC can work for a long time at a maximum of 2300 degrees Celsius. The following are some of our samples:
