Efector de cerámica de carburo de silicio para la transferencia de obleas en varios procesos de semiconductores

The silicon carbide mechanical arm is formed by isostatic pressing process and sintered at high temperature. According to the requirements of the user’s design drawings, the outline size, thickness size and shape can be refined to meet the specific requirements of users.

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Characteristics and advantages

1.Precise dimensions and thermal stability

2.High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation;

3.It has a smooth surface and good wear resistance, thus safely handling the chip without particle contamination.

4.Silicon carbide resistivity in 106-108Ω, non-magnetic, in line with anti-ESD specification requirements; It can prevent the accumulation of static electricity on the surface of the chip

5.Good thermal conductivity, low expansion coefficient.

 

 

 

 

 

 

Robot Arm Effector

 

 

 

 

 

SiC End Effector

 

 

 

 

 

 

Comparison of SIC ceramic materials

 

 

 

 

 

 

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