Silicon Carbide Vacuum Chuck and Wafer Handling Arm is formed by isostatic pressing process and high temperature sintering. The external dimensions, thickness and shapes can be finished according to the user’s design drawings to meet the user’s specific requirements.
Silicon carbide vacuum chuck is a key component used in semiconductor manufacturing and precision industrial applications for grabbing, handling and positioning thin and fragile workpieces such as wafers, glass substrates and optical components. It uses vacuum force to create negative pressure, allowing it to firmly adhere to the surface of the workpiece and release when needed. Silicon carbide vacuum chucks are widely used in semiconductor manufacturing, flat panel displays, optical manufacturing and other precision industrial fields. They can be used for operations such as wafer loading and transfer, substrate alignment, glass plate grabbing and handling, providing high-precision, high-stability and safe workpiece handling solutions.
The characteristics of silicon carbide vacuum chucks are as follows:
1. High temperature resistance: Silicon carbide has excellent high temperature stability and can operate for a long time in a high temperature environment without damage, which is suitable for processes that require high temperature processing.
2. High hardness and wear resistance: Silicon carbide has high hardness and can resist friction and wear, increasing the durability and life of the chuck.
3. Excellent chemical inertness: Silicon carbide has high resistance to a variety of chemicals and solvents and can work stably in chemical environments.
4. High vacuum sealing: Silicon carbide vacuum suction cups can provide reliable vacuum sealing, ensuring stable adsorption force and safe grasping of workpieces.
Podemos diseñar y fabricar de acuerdo con sus dimensiones específicas con buena calidad y tiempo de entrega razonable.
High temperature oxidation resistance
Excellent Corrosion resistance
Good Abrasion resistance
High coefficient of heat conductivity
Self-lubricity, low density
High hardness
Customized design.
-Campo resistente al desgaste: buje, placa, boquilla de arena, revestimiento de ciclones, barril de molienda, etc.…
-Campo de alta temperatura: losa SIC, tubo de horno de enfriamiento, tubo radiante, crisol, elemento de calentamiento, rodillo, haz, intercambiador de calor, tubería de aire frío, boquilla de quemador, tubo de protección de termopar, bote SIC, estructura de automóvil del horno, setter, etc.
-Campo militar a prueba de balas
-Semiconductor de carburo de silicio: bote de obleas SIC, chuck sic, paleta SiC, cassette de SiC, tubo de difusión SIC, horquilla de oblea, placa de succión, vía guía, etc.
-Campo de sello de carburo de silicio: todo tipo de anillo de sellado, rodamiento, buje, etc.
-Campo fotovoltaico: paleta en voladizo, barril de molienda, rodillo de carburo de silicio, etc.
-Campo de batería de litio
