Zirconia Ceramic Arm for Semiconductor Equipment

Zirconia (ZrO₂) is a material characterized by high mechanical strength and excellent fracture toughness at room temperature. Semicera’s zirconia material is 3 mol% yttria-stabilized partially stabilized zirconia (3Y-PSZ).

Due to its fine and uniform particle size, PSZ can be machined with high precision, making it increasingly suitable for precision components such as molds and other advanced machining parts.

In addition, it is widely used in industrial tooling, optical fiber connector components, and grinding and crushing media. The high fracture toughness of PSZ also enables its application in special spring elements. It is further used in consumer and industrial products such as ceramic knives, slicers, and other wear-resistant structural components.

Description

Zirconia (ZrO₂) is a high-performance ceramic material known for its excellent strength and fracture toughness at room temperature. Our material is 3 mol% yttria-stabilized partially stabilized zirconia (3Y-PSZ).

Thanks to its fine and uniform microstructure, PSZ can be precisely machined, making it well-suited for high-precision components such as molds and other advanced tooling parts. Its use in precision manufacturing continues to grow steadily.

It is also widely applied in industrial tooling, optical fiber connector components, and grinding or milling media. In addition, the high fracture toughness of PSZ allows it to be used in spring-like functional components. Beyond industrial applications, it is commonly found in ceramic knives, slicers, and other wear-resistant consumer products.

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Main characteristics

The main characteristics of zirconia ceramic parts:

  1. Excellent wear resistance, up to 276 times higher than stainless steel
  2. High density compared with most technical ceramics, typically > 6.0 g/cm³
  3. High hardness, Vickers hardness up to > 1300 HV
  4. High temperature resistance, capable of stable performance up to approximately 2400°C (depending on environment and grade)
  5. Low thermal conductivity, typically < 3 W/m·K at room temperature
  6. Coefficient of thermal expansion close to that of stainless steel, providing good thermal compatibility
  7. Outstanding fracture toughness, reaching up to 8 MPa·m¹/²
  8. Excellent chemical stability, with strong resistance to corrosion, aging, and rust-free performance
  9. Strong resistance to molten metals due to its high melting point and stable ceramic structure 

Application

Zirconia (ZrO₂) is widely used in a range of high-precision and wear-resistant applications due to its high strength, fracture toughness, and excellent dimensional stability.

Main applications include:

  • Mold and tooling components: Various precision molds, positioning fixtures, and insulation fixtures
  • Milling and grinding parts: Classifiers, air-flow mill components, and bead mill media
  • Industrial tools: Industrial cutters, slitter machine blades, and flat press rollers
  • Optical and fiber connector components: Sealing rings, ferrules/sleeves, and V-groove alignment fixtures
  • Special spring elements: Coil springs, plate springs, and other elastic functional components
  • Consumer products: Small insulated screwdrivers, ceramic knives, slicers, and other wear-resistant household tools

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