{"id":1310,"date":"2025-09-11T05:28:18","date_gmt":"2025-09-11T05:28:18","guid":{"rendered":"https:\/\/weitai2.globaldeepsea.site\/product\/isostatic-pecvd-graphite-boat\/"},"modified":"2025-09-11T05:28:23","modified_gmt":"2025-09-11T05:28:23","slug":"isostatic-pecvd-graphite-boat","status":"publish","type":"product","link":"https:\/\/www.cn-semiconductorparts.com\/es\/product\/isostatic-pecvd-graphite-boat\/","title":{"rendered":"Barco de grafito PECVD isost\u00e1tico"},"content":{"rendered":"
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SEMICERA isostatic PECVD graphite boat is a high-purity, high-density graphite product designed for wafer support in the PECVD (plasma enhanced chemical vapor deposition) process. SEMICERA uses advanced isostatic pressing technology to ensure that the graphite boat has excellent high temperature resistance, corrosion resistance, dimensional stability and good thermal conductivity, which is an indispensable consumable in the semiconductor manufacturing process.<\/span><\/p>\n

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SEMICERA isostatic PECVD graphite boat has the following advantages:<\/span><\/strong><\/span><\/h2>\n

\u00a0 \u25aa\u00a0 High purity: The graphite material is of high purity and low impurity content to avoid contamination of the wafer surface.<\/span><\/p>\n

\u00a0 \u25aa\u00a0\u00a0High density: High density, high mechanical strength, can withstand high temperature and high vacuum environment.<\/span><\/p>\n

\u00a0 \u25aa\u00a0\u00a0Good dimensional stability: Small dimensional change at high temperature to ensure process stability.<\/span><\/p>\n

\u00a0 \u25aa\u00a0\u00a0Excellent thermal conductivity: Effectively transfer heat to prevent wafer overheating.<\/span><\/p>\n

\u00a0 \u25aa\u00a0\u00a0Strong corrosion resistance: Able to resist erosion by various corrosive gases and plasma.<\/span><\/p>\n

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Performance parameter<\/span><\/strong><\/p>\n<\/td>\n

semicera<\/span><\/strong><\/td>\nSGL R6510<\/span><\/strong><\/td>\nPerformance parameter<\/span><\/strong><\/td>\n<\/tr>\n
Bulk density (g\/cm3)<\/span><\/td>\n1.91<\/span><\/td>\n1.83<\/span><\/td>\n1.85<\/span><\/td>\n<\/tr>\n
Bending strength (MPa)<\/span><\/td>\n63<\/span><\/td>\n60<\/span><\/td>\n49<\/span><\/td>\n<\/tr>\n
Compressive strength (MPa)<\/span><\/td>\n135<\/span><\/td>\n130<\/span><\/td>\n103<\/span><\/td>\n<\/tr>\n
Shore Hardness (HS)<\/span><\/td>\n70<\/span><\/td>\n64<\/span><\/td>\n60<\/span><\/td>\n<\/tr>\n
Coefficient of thermal expansion\uff0810-6\/K\uff09<\/span><\/td>\n85<\/span><\/td>\n105<\/span><\/td>\n130<\/span><\/td>\n<\/tr>\n
Coefficient of thermal expansion\uff0810-6\/K\uff09<\/span><\/td>\n5.85<\/span><\/td>\n4.2<\/span><\/td>\n5.0<\/span><\/td>\n<\/tr>\n
Resistivity (\u03bc\u03a9m)<\/span><\/td>\n11-13<\/span><\/td>\n13<\/span><\/td>\n10<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

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Advantages of choosing us:<\/span><\/strong><\/span>
\u00a0 \u25aa\u00a0\u00a0Material selection: High-purity graphite materials are used to ensure product quality.<\/span>
\u00a0 \u25aa\u00a0\u00a0Processing technology: Isostatic pressing is used to ensure product density and uniformity.<\/span>
\u00a0 \u25aa\u00a0\u00a0Size customization: Graphite boats of different sizes and shapes can be customized according to customer needs.<\/span>
\u00a0 \u25aa\u00a0\u00a0Surface treatment: A variety of surface treatment methods are provided, such as coating silicon carbide, boron nitride, etc., to meet different process requirements.<\/span><\/p>\n

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\"Isostatic <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Isostatic <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Isostatic <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Lugar <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Semicera <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"M\u00e1quina <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Procesamiento <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Casa <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"Nuestro <\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

Isostatic PECVD graphite boat is widely used in various links of semiconductor manufacturing, such as polysilicon film deposition, oxide film deposition, nitride film deposition, etc. Its excellent performance makes it an ideal wafer carrier in the PECVD process.<\/p>","protected":false},"featured_media":639,"comment_status":"closed","ping_status":"open","template":"","meta":[],"product_brand":[],"product_cat":[23,21],"product_tag":[],"class_list":{"0":"post-1310","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-lsotropic-graphite","7":"product_cat-specialty-graphite","9":"first","10":"instock","11":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/product\/1310","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/comments?post=1310"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/media\/639"}],"wp:attachment":[{"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/media?parent=1310"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/product_brand?post=1310"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/product_cat?post=1310"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.cn-semiconductorparts.com\/es\/wp-json\/wp\/v2\/product_tag?post=1310"}],"curies":[{"name":"WP","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}