TaC coating is a new generation of high temperature resistant material, with better high temperature stability than SiC, as a corrosion resistant coating, oxidation resistant coating, wear resistant coating, can be used in the environment above 2000℃, widely used in aerospace ultra-high temperature hot end parts, the third generation of semiconductor single crystal growth and other fields.
Semicera propose des revêtements de carbure de tantale (TAC) spécialisés pour divers composants et transporteurs. Semicera Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Graphite coated TaC susceptor), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
After years of development, Semicera has conquered the technology of CVD TaC with the joint efforts of the R&D department. Defects are easy to occur in the growth process of SiC wafers, but after using TaC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Semicera’ parts for single crystal growth
De plus, la durée de vie des produits de revêtement TAC de Semicera est plus longue et plus résistante à la température élevée que celle du revêtement SIC. Après une longue période de données de mesure de laboratoire, notre TAC peut fonctionner pendant une longue période à un maximum de 2300 degrés Celsius. Voici quelques-uns de nos échantillons:
