TaC coating is a new generation of high temperature resistant material, with better high temperature stability than SiC, as a corrosion resistant coating, oxidation resistant coating, wear resistant coating, can be used in the environment above 2000℃, widely used in aerospace ultra-high temperature hot end parts, the third generation of semiconductor single crystal growth and other fields.
Semicera propose des revêtements de carbure de tantale (TAC) spécialisés pour divers composants et transporteurs. Semicera Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Suscepteur TAC revêtu de graphite), et prolonger la durée de vie des composants du réacteur clé. L'utilisation du revêtement en carbure de carbure de tantale consiste à résoudre le problème des bords et à améliorer la qualité de la croissance des cristaux, et Semicera a permis de résoudre la technologie du revêtement en carbure de tantale (CVD), atteignant le niveau avancé international.
After years of development, Semicera has conquered the technology of CVD TaC with the joint efforts of the R&D department. Defects are easy to occur in the growth process of SiC wafers, but after using TaC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Semicera’ parts for single crystal growth
In addition, the service life of Semicera’s TaC coating products is longer and more resistant to high temperature than that of SiC coating. After a long time of laboratory measurement data, our TaC can work for a long time at a maximum of 2300 degrees Celsius. The following are some of our samples:
