Semicera’s Heating Elements for MOCVD Substrate are engineered to provide precise and stable temperature control in Metal-Organic Chemical Vapor Deposition (MOCVD) processes. Made from high-quality graphite, these heating elements offer exceptional thermal conductivity, uniform heating, and long-term reliability. Ideal for semiconductor manufacturing, LED production, and advanced material applications, Semicera’s heating elements ensure consistent performance, optimizing your MOCVD substrate process for maximum efficiency and quality.
Main features of graphite heater:
1. uniformity of heating structure.
2. good electrical conductivity and high electrical load.
3. corrosion resistance.
4. inoxidizability.
5. high chemical purity.
6. high mechanical strength.
The advantage is energy efficient, high value and low maintenance. We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.
|
Technical Specification |
Semicera-M3 |
|
Bulk Density (g/cm3) |
≥1.85 |
|
Ash Content (PPM) |
≤500 |
|
Shore Hardness |
≥45 |
|
Specific Resistance (μ.Ω.m) |
≤12 |
|
Flexural Strength (Mpa) |
≥40 |
|
Compressive Strength (Mpa) |
≥70 |
|
Max. Grain Size (μm) |
≤43 |
|
Coefficient of Thermal Expansion Mm/°C |
≤4.4*10-6 |
