silicon carbide Ceramic effector for the transfer of wafers in various semiconductor processes

The silicon carbide mechanical arm is formed by isostatic pressing process and sintered at high temperature. According to the requirements of the user’s design drawings, the outline size, thickness size and shape can be refined to meet the specific requirements of users.

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Caratteristiche e vantaggi

1.Precise dimensions and thermal stability

2.High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation;

3.I ha una superficie liscia e una buona resistenza all'usura, gestendo così in modo sicuro il chip senza contaminazione da particelle.

4.Silicon carbide resistivity in 106-108Ω, non-magnetic, in line with anti-ESD specification requirements; It can prevent the accumulation of static electricity on the surface of the chip

5. Guida conduttività termica, coefficiente di bassa espansione.

 

 

 

 

 

 

Robot Arm Effector

 

 

 

 

 

SiC End Effector

 

 

 

 

 

 

Comparison of SIC ceramic materials

 

 

 

 

 

 

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