Semicera Semiconductor’s TaC Coated Graphite Guide Ring is engineered for silicon carbide crystal growth, providing exceptional wear resistance and thermal stability. Choose Semicera for reliable and high-performance components.
TaC coated graphite guide rings refer to the deposition of a thin layer of Tantalum Carburo on the surface of a graphite guide ring to improve its wear resistance, high temperature resistance and chemical stability. This coating is usually formed on the surface of a graphite guide ring by techniques such as physical vapor deposition (PVD) or chemical vapor deposition (CVD).
Semicera offre rivestimenti specializzati in carburo di tantalum (TAC) per vari componenti e vettori. Il processo di rivestimento leader di semicera consente ai rivestimenti in carburo di tantalum (TAC) per ottenere elevata purezza, stabilità ad alta temperatura e elevata tolleranza chimica, migliorando la qualità del prodotto dei cristalli SIC/GAN e gli strati EPI (EPI (Suscettore TAC rivestito in grafite), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
Dopo anni di sviluppo, Semicera ha conquistato la tecnologia di CVD TAC con gli sforzi congiunti del dipartimento di ricerca e sviluppo. I difetti sono facili da verificarsi nel processo di crescita dei wafer SIC, ma dopo aver utilizzato Tac, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera’ parts for single crystal growth.
The main features of TaC coated graphite guide rings include:
1. High temperature resistance: TaC coating has excellent high temperature stability and can maintain stability in high temperature environments.
2. Wear resistance: The high hardness of the tantalum carbide thin layer gives the guide ring good wear resistance and extends its service life.
3. Chemical stability: TaC coating has high stability against chemical corrosion, making it suitable for applications in some corrosive media.
4. Reduce friction: TaC coating can effectively reduce the friction between the graphite guide ring and other components and improve the efficiency of mechanical seals.
Moreover, Semicera’s TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
