The Tantalum Carbide Coated Susceptor Support Plate by Semicera is designed for use in silicon carbide epitaxy and crystal growth. It provides stable support in high-temperature, corrosive, or high-pressure environments, essential for these advanced processes. Commonly used in high-pressure reactors, furnace structures, and chemical equipment, it ensures system performance and stability. Semicera’s innovative coating technology guarantees superior quality and reliability for demanding engineering applications.
Tantalum carbide coated susceptor support plate is a susceptor or support structure that is covered with a thin layer of Tantalum Carburo. This coating can be formed on the susceptor surface by techniques such as physical vapor deposition (PVD) or chemical vapor deposition (CVD), giving the susceptor the superior properties of Tantalum Carburo.
Semicera offre rivestimenti specializzati in carburo di tantalum (TAC) per vari componenti e vettori. Il processo di rivestimento leader di semicera consente ai rivestimenti in carburo di tantalum (TAC) per ottenere elevata purezza, stabilità ad alta temperatura e elevata tolleranza chimica, migliorando la qualità del prodotto dei cristalli SIC/GAN e gli strati EPI (EPI (Suscettore TAC rivestito in grafite), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
Dopo anni di sviluppo, Semicera ha conquistato la tecnologia di CVD TAC con gli sforzi congiunti del dipartimento di ricerca e sviluppo. I difetti sono facili da verificarsi nel processo di crescita dei wafer SIC, ma dopo aver utilizzato Tac, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera’ parts for single crystal growth.
The main features of tantalum carbide coated base support plates include:
1. High temperature stability: Tantalum carbide has excellent high temperature stability, making the coated base support plate suitable for support needs in high temperature working environments.
2. Corrosion resistance: Tantalum carbide coating has good corrosion resistance, can resist chemical corrosion and oxidation, and extend the service life of the base.
3. High hardness and wear resistance: The high hardness of tantalum carbide coating gives the base support plate good wear resistance, which is suitable for occasions requiring high wear resistance.
4. Chemical stability: Tantalum carbide has high stability to a variety of chemical substances, making the coated base support plate perform well in some corrosive environments.
Moreover, Semicera’s TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
