Silicon carbide (SiC) is a key material in the third generation of semiconductors, but its yield rate has been a limiting factor for industry growth. After extensive testing in Semicera’s laboratories, it has been found that sprayed and sintered TaC lacks the necessary purity and uniformity. In contrast, the CVD process ensures a purity level of 5 PPM and excellent uniformity. The use of CVD TaC significantly improves the yield rate of silicon carbide wafers. We welcome discussionsTantalum Carbide CVD Coating Guide Ringto further reduce the costs of SiC wafers.
Semicera offre rivestimenti specializzati in carburo di tantalum (TAC) per vari componenti e vettori. Il processo di rivestimento leader di semicera consente ai rivestimenti in carburo di tantalum (TAC) per ottenere elevata purezza, stabilità ad alta temperatura e elevata tolleranza chimica, migliorando la qualità del prodotto dei cristalli SIC/GAN e gli strati EPI (EPI (Suscettore TAC rivestito in grafite), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
Silicon carbide (SiC) is a key material in the third generation of semiconductors, but its yield rate has been a limiting factor for industry growth. After extensive testing in Semicera’s laboratories, it has been found that sprayed and sintered TaC lacks the necessary purity and uniformity. In contrast, the CVD process ensures a purity level of 5 PPM and excellent uniformity. The use of CVD TaC significantly improves the yield rate of silicon carbide wafers. We welcome discussions Tantalum Carbide CVD Coating Guide Ring to further reduce the costs of SiC wafers.
Dopo anni di sviluppo, Semicera ha conquistato la tecnologia di CVD TAC con gli sforzi congiunti del dipartimento di ricerca e sviluppo. I difetti sono facili da verificarsi nel processo di crescita dei wafer SIC, ma dopo aver utilizzato Tac, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera’ parts for single crystal growth.
Moreover, Semicera’s TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
