Semicera offers a comprehensive range of susceptors and graphite components designed for various epitaxy reactors.Through strategic partnerships with industry-leading OEMs, extensive materials expertise, and advanced manufacturing capabilities, Semicera delivers tailored designs to meet the specific requirements of your application. Our commitment to excellence ensures that you receive optimal solutions for your epitaxy reactor needs.
Our company provides SiC coating process services on the surface of graphite, ceramics and other materials by CVD method, so that special gases containing carbon and silicon can react at high temperature to obtain high-purity Sic molecules, which can be deposited on the surface of coated materials to form a SiC protective layer for epitaxy barrel type hy pnotic.
1。高温酸化抵抗:
温度が1600 Cになると、酸化抵抗は非常に良好です。
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3。侵食抵抗：高硬度、コンパクトな表面、微粒子。
4。耐食性：酸、アルカリ、塩、有機試薬。
| SIC-CVDプロパティ | ||
| 結晶構造 | FCC β phase | |
| 密度 | g/cm ³ | 3.21 |
| 硬度 | ビッカーズの硬さ | 2500 |
| 穀物サイズ | μm | 2~10 |
| 化学純度 | % | 99.99995 |
| 熱容量 | J·kg-1 ·K-1 | 640 |
| 昇華温度 | ℃ | 2700 |
| フェレキュラルの強さ | MPa (RT 4-point) | 415 |
| Young’ s Modulus | Gpa (4pt bend, 1300℃) | 430 |
| 熱膨張（CTE） | 10-6K-1 | 4.5 |
| 熱伝導率 | （w/mk） | 300 |
