Semicera offers a comprehensive range of susceptors and graphite components designed for various epitaxy reactors.Through strategic partnerships with industry-leading OEMs, extensive materials expertise, and advanced manufacturing capabilities, Semicera delivers tailored designs to meet the specific requirements of your application. Our commitment to excellence ensures that you receive optimal solutions for your epitaxy reactor needs.
Our company provides SiC coating process services on the surface of graphite, ceramics and other materials by CVD method, so that special gases containing carbon and silicon can react at high temperature to obtain high-purity Sic molecules, which can be deposited on the surface of coated materials to form a SiC protective layer for epitaxy barrel type hy pnotic.
主な機能:
1 .High purity SiC coated graphite
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
CVD-SICコーティングの主な仕様
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SIC-CVDプロパティ |
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| 結晶構造 | FCC β phase | |
| 密度 | g/cm ³ | 3.21 |
| 硬度 | ビッカーズの硬さ | 2500 |
| 穀物サイズ | μm | 2~10 |
| 化学純度 | % | 99.99995 |
| 熱容量 | J·kg-1 ·K-1 | 640 |
| 昇華温度 | ℃ | 2700 |
| フェレキュラルの強さ | MPa (RT 4-point) | 415 |
| Young’ s Modulus | Gpa (4pt bend, 1300℃) | 430 |
| 熱膨張（CTE） | 10-6K-1 | 4.5 |
| 熱伝導率 | （w/mk） | 300 |
