GaN Epitaxy is a cornerstone in the production of high-performance semiconductor devices, offering exceptional efficiency, thermal stability, and reliability. Semicera’s GaN Epitaxy solutions are tailored to meet the demands of cutting-edge applications, ensuring superior quality and consistency in every layer.
セミセラ proudly presents its cutting-edge GaN Epitaxy services, designed to meet the ever-evolving needs of the semiconductor industry. Gallium nitride (GaN) is a material known for its exceptional properties, and our epitaxial growth processes ensure that these benefits are fully realized in your devices.
High-Performance GaN Layers セミセラ specializes in the production of high-quality GaN Epitaxy layers, offering unparalleled material purity and structural integrity. These layers are critical for a variety of applications, from power electronics to optoelectronics, where superior performance and reliability are essential. Our precision growth techniques ensure that each GaN layer meets the exacting standards required for cutting-edge devices.
Optimized for Efficiency The GaN Epitaxy provided by Semicera is specifically engineered to enhance the efficiency of your electronic components. By delivering low-defect, high-purity GaN layers, we enable devices to operate at higher frequencies and voltages, with reduced power loss. This optimization is key for applications such as high-electron-mobility transistors (HEMTs) and light-emitting diodes (LEDs), where efficiency is paramount.
Versatile Application Potential セミセラ’s GaN Epitaxy is versatile, catering to a broad range of industries and applications. Whether you are developing power amplifiers, RF components, or laser diodes, our GaN epitaxial layers provide the foundation needed for high-performance, reliable devices. Our process can be tailored to meet specific requirements, ensuring that your products achieve optimal results.
Commitment to Quality Quality is the cornerstone of セミセラ’s approach to GaN Epitaxy. We use advanced epitaxial growth technologies and rigorous quality control measures to produce GaN layers that exhibit excellent uniformity, low defect densities, and superior material properties. This commitment to quality ensures that your devices not only meet but exceed industry standards.
Innovative Growth Techniques セミセラ is at the forefront of innovation in the field of GaN Epitaxy. Our team continuously explores new methods and technologies to improve the growth process, delivering GaN layers with enhanced electrical and thermal characteristics. These innovations translate into better-performing devices, capable of meeting the demands of next-generation applications.
Customized Solutions for Your Projects Recognizing that each project has unique requirements, セミセラ offers customized GaN Epitaxy solutions. Whether you need specific doping profiles, layer thicknesses, or surface finishes, we work closely with you to develop a process that meets your exact needs. Our goal is to provide you with GaN layers that are precisely engineered to support your device’s performance and reliability.
アイテム |
生産 |
研究 |
ダミー |
クリスタルパラメーター |
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ポリタイプ |
4H |
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表面向きエラー |
4±0.15° |
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電気パラメーター |
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ドーパント |
N型窒素 |
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抵抗率 |
0.015-0.025OHM・CM |
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機械的パラメーター |
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直径 |
150.0±0.2mm |
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厚さ |
350±25 µm |
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一次フラットオリエンテーション |
[1-100]±5° |
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プライマリフラット長 |
47.5±1.5mm |
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二次フラット |
なし |
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TTV |
≤5 µm |
≤10 µm |
≤15 µm |
LTV |
≤3μm(5mm*5mm) |
≤5μm(5mm*5mm) |
≤10μm(5mm*5mm) |
弓 |
-15μm〜15μm |
-35μm〜35μm |
-45μm〜45μm |
ワープ |
≤35 µm |
≤45 µm |
≤55 µm |
フロント(si-face)粗さ(AFM) |
RA≤0.2nm(5μm*5μm) |
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構造 |
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マイクロパイプ密度 |
<1 EA/CM2 |
<10 EA/CM2 |
<15 EA/CM2 |
金属の不純物 |
≤5E10atoms/cm2 |
Na |
|
BPD |
≤1500 EA/CM2 |
≤3000 EA/CM2 |
Na |
TSD |
≤500 EA/CM2 |
≤1000 EA/CM2 |
Na |
フロント品質 |
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フロント |
si |
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表面仕上げ |
SI-FACE CMP |
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粒子 |
≤60EA/ウェーハ(サイズ以上0.3μm) |
Na |
|
傷 |
≤5EA/mm。累積長さ≤diameter |
累積長さ2*直径 |
Na |
オレンジの皮/ピット/染色/縞/亀裂/汚染 |
なし |
Na |
|
エッジチップ/インデント/骨折/ヘックスプレート |
なし |
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ポリタイプの領域 |
なし |
累積面積≤20% |
累積面積以下30% |
フロントレーザーマーキング |
なし |
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バック品質 |
|||
バックフィニッシュ |
C-Face CMP |
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傷 |
≤5EA/mm、累積長さ2*直径 |
Na |
|
バック欠陥(エッジチップ/インデント) |
なし |
||
背中の粗さ |
RA≤0.2nm(5μm*5μm) |
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バックレーザーマーキング |
1 mm(上端から) |
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角 |
|||
角 |
面取り |
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パッケージング |
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パッケージング |
真空パッケージングを使用したEPIの準備 マルチワーファーカセットパッケージ |
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*注:「NA」とは、言及されていないリクエスト項目がSemi-STDを参照することはできないことを意味します。 |