Semicera offers a comprehensive range of susceptors and graphite components designed for various epitaxy reactors.Through strategic partnerships with industry-leading OEMs, extensive materials expertise, and advanced manufacturing capabilities, Semicera delivers tailored designs to meet the specific requirements of your application. Our commitment to excellence ensures that you receive optimal solutions for your epitaxy reactor needs.
Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.
1 .High purity SiC coated graphite
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
| SIC-CVDプロパティ | ||
| 結晶構造 | FCCβ相 | |
| 密度 | g/cm³ | 3.21 |
| 硬度 | ビッカーズの硬さ | 2500 |
| 穀物サイズ | mm | 2~10 |
| 化学純度 | % | 99.99995 |
| 熱容量 | J・kg-1・k-1 | 640 |
| 昇華温度 | ℃ | 2700 |
| フェレキュラルの強さ | MPA（RT 4ポイント） | 415 |
| ヤングモジュラス | GPA（4ptベンド、1300℃） | 430 |
| 熱膨張（CTE） | 10-6K-1 | 4.5 |
| 熱伝導率 | （w/mk） | 300 |
