PFAカセット

PFA Cassette– Experience unmatched chemical resistance and durability with Semicera’s PFA Cassette, the ideal solution for safe and efficient wafer handling in semiconductor manufacturing.

セミセラ is pleased to offer the PFAカセット, a premium choice for wafer handling in environments where chemical resistance and durability are paramount. Crafted from high-purity Perfluoroalkoxy (PFA) material, this cassette is designed to withstand the most demanding conditions in semiconductor fabrication, ensuring the safety and integrity of your wafers.

Unmatched Chemical Resistance The PFAカセット is engineered to provide superior resistance to a wide range of chemicals, making it the perfect choice for processes that involve aggressive acids, solvents, and other harsh chemicals. This robust chemical resistance ensures that the cassette remains intact and functional even in the most corrosive environments, thereby extending its lifespan and reducing the need for frequent replacements.

High-Purity Construction Semicera’s PFAカセット is manufactured from ultra-pure PFA material, which is critical in preventing contamination during wafer processing. This high-purity construction minimizes the risk of particle generation and chemical leaching, ensuring that your wafers are protected from impurities that could compromise their quality.

Enhanced Durability and Performance Designed for durability, the PFAカセット maintains its structural integrity under extreme temperatures and rigorous processing conditions. Whether exposed to high temperatures or subjected to repeated handling, this cassette retains its shape and performance, offering long-term reliability in demanding manufacturing environments.

Precision Engineering for Secure Handling The Semicera PFA Cassette features precise engineering that ensures secure and stable wafer handling. Each slot is carefully designed to hold wafers securely in place, preventing any movement or shifting that could result in damage. This precision engineering supports consistent and accurate wafer placement, contributing to overall process efficiency.

Versatile Application Across Processes Thanks to its superior material properties, the PFAカセット is versatile enough to be used across various stages of semiconductor fabrication. It is particularly well-suited for wet etching, chemical vapor deposition (CVD), and other processes that involve harsh chemical environments. Its adaptability makes it an essential tool in maintaining process integrity and wafer quality.

Commitment to Quality and Innovation At Semicera, we are committed to providing products that meet the highest industry standards. The PFAカセット exemplifies this commitment, offering a reliable solution that integrates seamlessly into your manufacturing processes. Each cassette undergoes strict quality control to ensure it meets our rigorous performance criteria, delivering the excellence you expect from Semicera.

アイテム

生産

研究

ダミー

クリスタルパラメーター

ポリタイプ

4H

表面向きエラー

4±0.15°

電気パラメーター

ドーパント

N型窒素

抵抗率

0.015-0.025OHM・CM

機械的パラメーター

直径

150.0±0.2mm

厚さ

350±25 µm

一次フラットオリエンテーション

[1-100]±5°

プライマリフラット長

47.5±1.5mm

二次フラット

なし

TTV

≤5 µm

≤10 µm

≤15 µm

LTV

≤3μm(5mm*5mm)

≤5μm(5mm*5mm)

≤10μm(5mm*5mm)

-15μm〜15μm

-35μm〜35μm

-45μm〜45μm

ワープ

≤35 µm

≤45 µm

≤55 µm

フロント(si-face)粗さ(AFM)

RA≤0.2nm(5μm*5μm)

構造

マイクロパイプ密度

<1 EA/CM2

<10 EA/CM2

<15 EA/CM2

金属の不純物

≤5E10atoms/cm2

Na

BPD

≤1500 EA/CM2

≤3000 EA/CM2

Na

TSD

≤500 EA/CM2

≤1000 EA/CM2

Na

フロント品質

フロント

si

表面仕上げ

SI-FACE CMP

粒子

≤60EA/ウェーハ(サイズ以上0.3μm)

Na

≤5EA/mm。累積長さ≤diameter

累積長さ2*直径

Na

オレンジの皮/ピット/染色/縞/亀裂/汚染

なし

Na

エッジチップ/インデント/骨折/ヘックスプレート

なし

ポリタイプの領域

なし

累積面積≤20%

累積面積以下30%

フロントレーザーマーキング

なし

バック品質

バックフィニッシュ

C-Face CMP

≤5EA/mm、累積長さ2*直径

Na

バック欠陥(エッジチップ/インデント)

なし

背中の粗さ

RA≤0.2nm(5μm*5μm)

バックレーザーマーキング

1 mm(上端から)

面取り

パッケージング

パッケージング

真空パッケージングを使用したEPIの準備

マルチワーファーカセットパッケージ

*注:「NA」とは、言及されていないリクエスト項目がSemi-STDを参照することはできないことを意味します。

tech_1_2_size

sic wafers

ニューレター

私たちとの連絡を楽しみにしています