Semiconductor Cassette– Protect and transport your wafers with precision using Semicera’s Semiconductor Cassette, designed to ensure optimal safety and efficiency in high-tech manufacturing environments.
セミセラ introduces the Semiconductor Cassette, an essential tool for the secure and efficient handling of wafers throughout the semiconductor manufacturing process. Engineered with high precision, this cassette ensures that your wafers are safely stored and transported, maintaining their integrity at every stage.
Superior Protection and Durability The Semiconductor Cassette from Semicera is built to offer maximum protection to your wafers. Constructed from robust, contamination-resistant materials, it shields your wafers from potential damage and contamination, making it an ideal choice for cleanroom environments. The cassette’s design minimizes particulate generation and ensures that wafers remain untouched and secure during handling and transportation.
Enhanced Design for Optimal Performance Semicera’s Semiconductor Cassette features a meticulously engineered design that provides precise wafer alignment, reducing the risk of misalignment and mechanical damage. The cassette’s slots are perfectly spaced to hold each wafer securely, preventing any movement that could result in scratches or other imperfections.
Versatility and Compatibility The Semiconductor Cassette is versatile and compatible with various wafer sizes, making it suitable for different stages of semiconductor fabrication. Whether you’re working with standard or custom wafer dimensions, this cassette adapts to your needs, offering flexibility in your manufacturing processes.
Streamlined Handling and Efficiency Designed with the user in mind, the Semicera Semiconductor Cassette is lightweight and easy to handle, allowing for quick and efficient loading and unloading. This ergonomic design not only saves time but also reduces the risk of human error, ensuring smooth operations within your facility.
Meeting Industry Standards Semicera ensures that the Semiconductor Cassette meets the highest industry standards for quality and reliability. Each cassette undergoes rigorous testing to guarantee that it performs consistently under the demanding conditions of semiconductor manufacturing. This dedication to quality ensures that your wafers are always protected, maintaining the high standards required in the industry.
アイテム |
生産 |
研究 |
ダミー |
クリスタルパラメーター |
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ポリタイプ |
4H |
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表面向きエラー |
4±0.15° |
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電気パラメーター |
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ドーパント |
N型窒素 |
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抵抗率 |
0.015-0.025OHM・CM |
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機械的パラメーター |
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直径 |
150.0±0.2mm |
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厚さ |
350±25 µm |
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一次フラットオリエンテーション |
[1-100]±5° |
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プライマリフラット長 |
47.5±1.5mm |
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二次フラット |
なし |
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TTV |
≤5 µm |
≤10 µm |
≤15 µm |
LTV |
≤3μm(5mm*5mm) |
≤5μm(5mm*5mm) |
≤10μm(5mm*5mm) |
弓 |
-15μm〜15μm |
-35μm〜35μm |
-45μm〜45μm |
ワープ |
≤35 µm |
≤45 µm |
≤55 µm |
フロント(si-face)粗さ(AFM) |
RA≤0.2nm(5μm*5μm) |
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構造 |
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マイクロパイプ密度 |
<1 EA/CM2 |
<10 EA/CM2 |
<15 EA/CM2 |
金属の不純物 |
≤5E10atoms/cm2 |
Na |
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BPD |
≤1500 EA/CM2 |
≤3000 EA/CM2 |
Na |
TSD |
≤500 EA/CM2 |
≤1000 EA/CM2 |
Na |
フロント品質 |
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フロント |
si |
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表面仕上げ |
SI-FACE CMP |
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粒子 |
≤60EA/ウェーハ(サイズ以上0.3μm) |
Na |
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傷 |
≤5EA/mm。累積長さ≤diameter |
累積長さ2*直径 |
Na |
オレンジの皮/ピット/染色/縞/亀裂/汚染 |
なし |
Na |
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エッジチップ/インデント/骨折/ヘックスプレート |
なし |
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ポリタイプの領域 |
なし |
累積面積≤20% |
累積面積以下30% |
フロントレーザーマーキング |
なし |
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バック品質 |
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バックフィニッシュ |
C-Face CMP |
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傷 |
≤5EA/mm、累積長さ2*直径 |
Na |
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バック欠陥(エッジチップ/インデント) |
なし |
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背中の粗さ |
RA≤0.2nm(5μm*5μm) |
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バックレーザーマーキング |
1 mm(上端から) |
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角 |
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角 |
面取り |
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パッケージング |
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パッケージング |
真空パッケージングを使用したEPIの準備 マルチワーファーカセットパッケージ |
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*注:「NA」とは、言及されていないリクエスト項目がSemi-STDを参照することはできないことを意味します。 |