SiC Coated Susceptor for Deep UV-LED

Semicera Energy Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics. Our main products include: Silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.The products are mainly used in the semiconductor and photovoltaic industries, such as crystal growth, epitaxy, etching, packaging, coating and diffusion furnace equipment.

説明

Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.

6

UV-LED-1

UV-LED-2

主な機能

1. High temperature oxidation resistance: the oxidation resistance is still very good when the temperature is as high as 1600 C.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3。侵食抵抗:高硬度、コンパクトな表面、微粒子。
4。耐食性:酸、アルカリ、塩、有機試薬。

CVD-SICコーティングの主な仕様

SIC-CVDプロパティ
結晶構造 FCCβ相
密度 g/cm³ 3.21
硬度 ビッカーズの硬さ 2500
穀物サイズ mm 2~10
化学純度 % 99.99995
熱容量 J・kg-1・k-1 640
昇華温度 2700
フェレキュラルの強さ MPA(RT 4ポイント) 415
ヤングモジュラス GPA(4ptベンド、1300℃) 430
熱膨張(CTE) 10-6K-1 4.5
熱伝導率 (w/mk) 300

セミセラの職場

セミセラ職場2

機器マシン

CNN処理、化学洗浄、CVDコーティング

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