{"id":1400,"date":"2025-09-11T05:28:53","date_gmt":"2025-09-11T05:28:53","guid":{"rendered":"https:\/\/weitai2.globaldeepsea.site\/product\/ga2o3-epitaxy\/"},"modified":"2026-04-29T15:33:46","modified_gmt":"2026-04-29T07:33:46","slug":"ga2o3-epitaxy","status":"publish","type":"product","link":"https:\/\/www.cn-semiconductorparts.com\/ja\/product\/ga2o3-epitaxy\/","title":{"rendered":"GA2O3\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc"},"content":{"rendered":"
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\u30bb\u30df\u30bb\u30e9<\/em> \u8a87\u3089\u3057\u3052\u306b\u7533\u3057\u51fa\u307e\u3059 ga2<\/sub>O3<\/sub> \u30a8\u30d4\u30bf\u30ad\u30b7\u30fc<\/strong>\u3001\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3068\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u5883\u754c\u3092\u62bc\u3057\u4e0a\u3052\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u305f\u6700\u5148\u7aef\u306e\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3002\u3053\u306e\u9ad8\u5ea6\u306a\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6280\u8853\u306f\u3001\u9178\u5316\u30ac\u30ea\u30a6\u30e0\u306e\u30e6\u30cb\u30fc\u30af\u306a\u7279\u6027\u3092\u6d3b\u7528\u3057\u3066\u3044\u307e\u3059\uff08GA2<\/sub>O3<\/sub>\uff09\u8981\u6c42\u306e\u53b3\u3057\u3044\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u512a\u308c\u305f\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u63d0\u4f9b\u3059\u308b\u3002<\/span><\/p>\n

\u91cd\u8981\u306a\u6a5f\u80fd:<\/strong><\/span><\/p>\n

\u00a0 \u00a0 \u00a0\u2022\u00a0\u4f8b\u5916\u7684\u306a\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7<\/strong>: ga2<\/sub>O3<\/sub> \u30a8\u30d4\u30bf\u30ad\u30b7\u30fc<\/strong> \u8d85\u5e45\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u5099\u3048\u3066\u304a\u308a\u3001\u9ad8\u96fb\u529b\u74b0\u5883\u3067\u306e\u30d6\u30ec\u30fc\u30af\u30c0\u30a6\u30f3\u96fb\u5727\u3068\u52b9\u7387\u7684\u306a\u52d5\u4f5c\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002<\/span><\/p>\n

\u00a0 \u00a0 \u00a0\u2022\u00a0<\/strong>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u7387<\/strong>: \u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306f\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u7387\u3092\u63d0\u4f9b\u3057\u3001\u9ad8\u6e29\u6761\u4ef6\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u52d5\u4f5c\u3092\u78ba\u4fdd\u3057\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306b\u6700\u9069\u3067\u3059\u3002<\/span><\/p>\n

\u00a0 \u00a0 \u00a0\u2022\u00a0<\/strong>\u512a\u308c\u305f\u6750\u6599\u54c1\u8cea<\/strong>: \u7279\u306b\u30d1\u30ef\u30fc\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084UV\u691c\u51fa\u5668\u306a\u3069\u306e\u91cd\u8981\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u3001\u6700\u5c0f\u9650\u306e\u6b20\u9665\u3067\u9ad8\u3044\u7d50\u6676\u54c1\u8cea\u3092\u9054\u6210\u3057\u3001\u6700\u9069\u306a\u30c7\u30d0\u30a4\u30b9\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3068\u5bff\u547d\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002<\/span><\/p>\n

\u00a0 \u00a0 \u00a0\u2022\u00a0<\/strong>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u6c4e\u7528\u6027<\/strong>: Power Electronics\u3001RF\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001\u304a\u3088\u3073OptoElectronics\u306b\u6700\u9069\u3067\u3042\u308a\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u3067\u304d\u308b\u57fa\u76e4\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002<\/span><\/p>\n

\u00a0<\/p>\n

\u306e\u53ef\u80fd\u6027\u3092\u767a\u898b\u3057\u3066\u304f\u3060\u3055\u3044 ga2<\/sub>O3<\/sub> \u30a8\u30d4\u30bf\u30ad\u30b7\u30fc<\/strong> Semicera\u306e\u9769\u65b0\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u88fd\u54c1\u306f\u3001\u54c1\u8cea\u3068\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u6700\u9ad8\u6c34\u6e96\u3092\u6e80\u305f\u3059\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u304a\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u304c\u6700\u5927\u306e\u52b9\u7387\u3068\u4fe1\u983c\u6027\u3067\u52d5\u4f5c\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u307e\u3059\u3002\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3064\u3044\u3066\u306f\u3001Semicera\u3092\u9078\u629e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/span><\/p>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n

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\u30a2\u30a4\u30c6\u30e0<\/p>\n<\/td>\n

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\u751f\u7523<\/p>\n<\/td>\n

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\u7814\u7a76<\/p>\n<\/td>\n

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\u30c0\u30df\u30fc<\/p>\n<\/td>\n<\/tr>\n

\n

\u30af\u30ea\u30b9\u30bf\u30eb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/p>\n<\/td>\n<\/tr>\n

\n

\u30dd\u30ea\u30bf\u30a4\u30d7<\/p>\n<\/td>\n

\n

4H<\/p>\n<\/td>\n<\/tr>\n

\n

\u8868\u9762\u5411\u304d\u30a8\u30e9\u30fc<\/p>\n<\/td>\n

\n

4\u00b10.15\u00b0<\/p>\n<\/td>\n<\/tr>\n

\n

\u96fb\u6c17\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/p>\n<\/td>\n<\/tr>\n

\n

\u30c9\u30fc\u30d1\u30f3\u30c8<\/p>\n<\/td>\n

\n

N\u578b\u7a92\u7d20<\/p>\n<\/td>\n<\/tr>\n

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\u62b5\u6297\u7387<\/p>\n<\/td>\n

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0.015-0.025OHM\u30fbCM<\/p>\n<\/td>\n<\/tr>\n

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\u6a5f\u68b0\u7684\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/p>\n<\/td>\n<\/tr>\n

\n

\u76f4\u5f84<\/p>\n<\/td>\n

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150.0\u00b10.2mm<\/p>\n<\/td>\n<\/tr>\n

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\u539a\u3055<\/p>\n<\/td>\n

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350\u00b125 \u00b5m<\/p>\n<\/td>\n<\/tr>\n

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\u4e00\u6b21\u30d5\u30e9\u30c3\u30c8\u30aa\u30ea\u30a8\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3<\/p>\n<\/td>\n

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[1-100]\u00b15\u00b0<\/p>\n<\/td>\n<\/tr>\n

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\u30d7\u30e9\u30a4\u30de\u30ea\u30d5\u30e9\u30c3\u30c8\u9577<\/p>\n<\/td>\n

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47.5\u00b11.5mm<\/p>\n<\/td>\n<\/tr>\n

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\u4e8c\u6b21\u30d5\u30e9\u30c3\u30c8<\/p>\n<\/td>\n

\n

\u306a\u3057<\/p>\n<\/td>\n<\/tr>\n

\n

TTV<\/p>\n<\/td>\n

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\u22645 \u00b5m<\/p>\n<\/td>\n

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\u226410 \u00b5m<\/p>\n<\/td>\n

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\u226415 \u00b5m<\/p>\n<\/td>\n<\/tr>\n

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LTV<\/p>\n<\/td>\n

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\u22643\u03bcm\uff085mm*5mm\uff09<\/p>\n<\/td>\n

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\u22645\u03bcm\uff085mm*5mm\uff09<\/p>\n<\/td>\n

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\u226410\u03bcm\uff085mm*5mm\uff09<\/p>\n<\/td>\n<\/tr>\n

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\u5f13<\/p>\n<\/td>\n

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-15\u03bcm\u301c15\u03bcm<\/p>\n<\/td>\n

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-35\u03bcm\u301c35\u03bcm<\/p>\n<\/td>\n

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-45\u03bcm\u301c45\u03bcm<\/p>\n<\/td>\n<\/tr>\n

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\u30ef\u30fc\u30d7<\/p>\n<\/td>\n

\n

\u226435 \u00b5m<\/p>\n<\/td>\n

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\u226445 \u00b5m<\/p>\n<\/td>\n

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\u226455 \u00b5m<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d5\u30ed\u30f3\u30c8\uff08si-face\uff09\u7c97\u3055\uff08AFM\uff09<\/p>\n<\/td>\n

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RA\u22640.2nm\uff085\u03bcm*5\u03bcm\uff09<\/p>\n<\/td>\n<\/tr>\n

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\u69cb\u9020<\/p>\n<\/td>\n<\/tr>\n

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\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u5bc6\u5ea6<\/p>\n<\/td>\n

\n

<1 EA\/CM2<\/p>\n<\/td>\n

\n

<10 EA\/CM2<\/p>\n<\/td>\n

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<15 EA\/CM2<\/p>\n<\/td>\n<\/tr>\n

\n

\u91d1\u5c5e\u306e\u4e0d\u7d14\u7269<\/p>\n<\/td>\n

\n

\u22645E10atoms\/cm2<\/p>\n<\/td>\n

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Na<\/p>\n<\/td>\n<\/tr>\n

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BPD<\/p>\n<\/td>\n

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\u22641500 EA\/CM2<\/p>\n<\/td>\n

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\u22643000 EA\/CM2<\/p>\n<\/td>\n

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Na<\/p>\n<\/td>\n<\/tr>\n

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TSD<\/p>\n<\/td>\n

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\u2264500 EA\/CM2<\/p>\n<\/td>\n

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\u22641000 EA\/CM2<\/p>\n<\/td>\n

\n

Na<\/p>\n<\/td>\n<\/tr>\n

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\u30d5\u30ed\u30f3\u30c8\u54c1\u8cea<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d5\u30ed\u30f3\u30c8<\/p>\n<\/td>\n

\n

si<\/p>\n<\/td>\n<\/tr>\n

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\u8868\u9762\u4ed5\u4e0a\u3052<\/p>\n<\/td>\n

\n

SI-FACE CMP<\/p>\n<\/td>\n<\/tr>\n

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\u7c92\u5b50<\/p>\n<\/td>\n

\n

\u226460EA\/\u30a6\u30a7\u30fc\u30cf\uff08\u30b5\u30a4\u30ba\u4ee5\u4e0a0.3\u03bcm\uff09<\/p>\n<\/td>\n

\n

Na<\/p>\n<\/td>\n<\/tr>\n

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\u50b7<\/p>\n<\/td>\n

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\u22645EA\/mm\u3002\u7d2f\u7a4d\u9577\u3055\u2264diameter<\/p>\n<\/td>\n

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\u7d2f\u7a4d\u9577\u30552*\u76f4\u5f84<\/p>\n<\/td>\n

\n

Na<\/p>\n<\/td>\n<\/tr>\n

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\u30aa\u30ec\u30f3\u30b8\u306e\u76ae\/\u30d4\u30c3\u30c8\/\u67d3\u8272\/\u7e1e\/\u4e80\u88c2\/\u6c5a\u67d3<\/p>\n<\/td>\n

\n

\u306a\u3057<\/p>\n<\/td>\n

\n

Na<\/p>\n<\/td>\n<\/tr>\n

\n

\u30a8\u30c3\u30b8\u30c1\u30c3\u30d7\/\u30a4\u30f3\u30c7\u30f3\u30c8\/\u9aa8\u6298\/\u30d8\u30c3\u30af\u30b9\u30d7\u30ec\u30fc\u30c8<\/p>\n<\/td>\n

\n

\u306a\u3057<\/p>\n<\/td>\n<\/tr>\n

\n

\u30dd\u30ea\u30bf\u30a4\u30d7\u306e\u9818\u57df<\/p>\n<\/td>\n

\n

\u306a\u3057<\/p>\n<\/td>\n

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\u7d2f\u7a4d\u9762\u7a4d\u226420%<\/p>\n<\/td>\n

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\u7d2f\u7a4d\u9762\u7a4d\u4ee5\u4e0b30%<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d5\u30ed\u30f3\u30c8\u30ec\u30fc\u30b6\u30fc\u30de\u30fc\u30ad\u30f3\u30b0<\/p>\n<\/td>\n

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\u306a\u3057<\/p>\n<\/td>\n<\/tr>\n

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\u30d0\u30c3\u30af\u54c1\u8cea<\/p>\n<\/td>\n<\/tr>\n

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\u30d0\u30c3\u30af\u30d5\u30a3\u30cb\u30c3\u30b7\u30e5<\/p>\n<\/td>\n

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C-Face CMP<\/p>\n<\/td>\n<\/tr>\n

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\u50b7<\/p>\n<\/td>\n

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\u22645EA\/mm\u3001\u7d2f\u7a4d\u9577\u30552*\u76f4\u5f84<\/p>\n<\/td>\n

\n

Na<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d0\u30c3\u30af\u6b20\u9665\uff08\u30a8\u30c3\u30b8\u30c1\u30c3\u30d7\/\u30a4\u30f3\u30c7\u30f3\u30c8\uff09<\/p>\n<\/td>\n

\n

\u306a\u3057<\/p>\n<\/td>\n<\/tr>\n

\n

\u80cc\u4e2d\u306e\u7c97\u3055<\/p>\n<\/td>\n

\n

RA\u22640.2nm\uff085\u03bcm*5\u03bcm\uff09<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d0\u30c3\u30af\u30ec\u30fc\u30b6\u30fc\u30de\u30fc\u30ad\u30f3\u30b0<\/p>\n<\/td>\n

\n

1 mm\uff08\u4e0a\u7aef\u304b\u3089\uff09<\/p>\n<\/td>\n<\/tr>\n

\n

\u89d2<\/p>\n<\/td>\n<\/tr>\n

\n

\u89d2<\/p>\n<\/td>\n

\n

\u9762\u53d6\u308a<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/p>\n<\/td>\n<\/tr>\n

\n

\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/p>\n<\/td>\n

\n

\u771f\u7a7a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3092\u4f7f\u7528\u3057\u305fEPI\u306e\u6e96\u5099<\/p>\n

\u30de\u30eb\u30c1\u30ef\u30fc\u30d5\u30a1\u30fc\u30ab\u30bb\u30c3\u30c8\u30d1\u30c3\u30b1\u30fc\u30b8<\/p>\n<\/td>\n<\/tr>\n

\n

*\u6ce8\uff1a\u300cNA\u300d\u3068\u306f\u3001\u8a00\u53ca\u3055\u308c\u3066\u3044\u306a\u3044\u30ea\u30af\u30a8\u30b9\u30c8\u9805\u76ee\u304cSemi-STD\u3092\u53c2\u7167\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u306a\u3044\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n

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\"tech_1_2_size\" <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
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\"sic <\/img><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

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