Semiconductor Cassette– Protect and transport your wafers with precision using Semicera’s Semiconductor Cassette, designed to ensure optimal safety and efficiency in high-tech manufacturing environments.
세미카 introduces the Semiconductor Cassette, an essential tool for the secure and efficient handling of wafers throughout the semiconductor manufacturing process. Engineered with high precision, this cassette ensures that your wafers are safely stored and transported, maintaining their integrity at every stage.
Superior Protection and Durability 그만큼 Semiconductor Cassette from Semicera is built to offer maximum protection to your wafers. Constructed from robust, contamination-resistant materials, it shields your wafers from potential damage and contamination, making it an ideal choice for cleanroom environments. The cassette’s design minimizes particulate generation and ensures that wafers remain untouched and secure during handling and transportation.
Enhanced Design for Optimal Performance 세미 케리 Semiconductor Cassette features a meticulously engineered design that provides precise wafer alignment, reducing the risk of misalignment and mechanical damage. The cassette’s slots are perfectly spaced to hold each wafer securely, preventing any movement that could result in scratches or other imperfections.
Versatility and Compatibility 그만큼 Semiconductor Cassette is versatile and compatible with various wafer sizes, making it suitable for different stages of semiconductor fabrication. Whether you’re working with standard or custom wafer dimensions, this cassette adapts to your needs, offering flexibility in your manufacturing processes.
Streamlined Handling and Efficiency Designed with the user in mind, the Semicera Semiconductor Cassette is lightweight and easy to handle, allowing for quick and efficient loading and unloading. This ergonomic design not only saves time but also reduces the risk of human error, ensuring smooth operations within your facility.
Meeting Industry Standards Semicera ensures that the Semiconductor Cassette meets the highest industry standards for quality and reliability. Each cassette undergoes rigorous testing to guarantee that it performs consistently under the demanding conditions of semiconductor manufacturing. This dedication to quality ensures that your wafers are always protected, maintaining the high standards required in the industry.
| 항목 | 생산 | 연구 | 더미 | 
| 결정 매개 변수 | |||
| 폴리 타입 | 4H | ||
| 표면 방향 오류 | 4±0.15° | ||
| 전기 매개 변수 | |||
| 도펀트 | N- 타입 질소 | ||
| 저항 | 0.015-0.025ohm · cm | ||
| 기계적 매개 변수 | |||
| 지름 | 150.0 ± 0.2mm | ||
| 두께 | 350 ± 25 µm | ||
| 1 차 평평한 방향 | [1-100]±5° | ||
| 1 차 평평한 길이 | 47.5 ± 1.5mm | ||
| 보조 아파트 | 없음 | ||
| TTV | ≤5 µm | ≤10 µm | ≤15 µm | 
| LTV | ≤3 μm (5mm*5mm) | ≤5 μm (5mm*5mm) | ≤10 μm (5mm*5mm) | 
| 절하다 | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm | 
| 경사 | ≤35 µm | ≤45 µm | ≤55 µm | 
| 전면 (si-face) 거칠기 (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| 구조 | |||
| 마이크로 파이프 밀도 | <1 EA/CM2 | <10 EA/CM2 | <15 EA/CM2 | 
| 금속 불순물 | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 EA/CM2 | ≤3000 EA/CM2 | NA | 
| TSD | ≤500 EA/CM2 | ≤1000 EA/CM2 | NA | 
| 프론트 품질 | |||
| 앞쪽 | 시 | ||
| 표면 마감 | Si-Face CMP | ||
| 입자 | ≤60EA/웨이퍼 (크기 0.3μm) | NA | |
| 흠집 | ≤5EA/mm. 누적 길이 ≤ diameter | 누적 길이 ≤2*직경 | NA | 
| 오렌지 껍질/구덩이/얼룩/줄무늬/균열/오염 | 없음 | NA | |
| 에지 칩/인테이션/골절/육각 플레이트 | 없음 | ||
| 폴리 타입 영역 | 없음 | 누적 면적 ≤20% | 누적 면적 ≤30% | 
| 전면 레이저 표시 | 없음 | ||
| 뒤로 품질 | |||
| 뒤로 마무리 | C-Face CMP | ||
| 흠집 | ≤5EA/mm, 누적 길이 ≤2*직경 | NA | |
| 등 결함 (Edge Chips/Indents) | 없음 | ||
| 뒤로 거칠기 | Ra≤0.2nm (5μm*5μm) | ||
| 뒤 레이저 표시 | 1 mm (상단 가장자리에서) | ||
| 가장자리 | |||
| 가장자리 | 모따기 | ||
| 포장 | |||
| 포장 | 진공 포장으로 에피 레디 멀티 웨이 커 카세트 포장 | ||
| *참고 :“NA”는 언급되지 않은 요청 항목이 Semi-STD를 참조 할 수 없음을 의미합니다. | |||
 
 