실리콘 카바이드 코팅 에피 택셜 반응기 배럴

Semicera is a high-tech enterprise engaged in material research for many years, with a leading R&D team and integrated R&D and manufacturing. Provide customized  Silicon Carbide Coated Epitaxial Reactor Barrelto discuss with our technical experts how to get the best performance and market advantage for your products.

실리콘 카바이드 코팅이있는 이유는 무엇입니까?

반도체 필드에서, 각 성분의 안정성은 전체 프로세스에 매우 중요합니다. 그러나, 고온 환경에서, 흑연은 쉽게 산화되고 손실되며, SIC 코팅은 흑연 부품에 안정적인 보호를 제공 할 수있다. 에서 세미카 team, we have our own graphite purification processing equipment, which can control the purity of graphite below 5ppm. The purity of the silicon carbide coating is below 0.5 ppm.

 

우리의 장점, 왜 세미카페를 선택합니까?

✓Top-quality in China market

 

✓Good service always for you, 7*24 hours

 

✓Short date of delivery

 

✓Small MOQ welcome and accepted

 

✓Custom services

석영 생산 장비 4

Application

Epitaxy Growth Susceptor

Silicon/silicon carbide wafers need to go through multiple processes to be used in electronic devices. An important process is silicon/sic epitaxy, in which silicon/sic wafers are carried on a graphite base. Special advantages of Semicera’s silicon carbide-coated graphite base include extremely high purity, uniform coating, and extremely long service life. They also have high chemical resistance and thermal stability.

 

Si epitaxy barrel susceptor

Silicon Epitaxy Susceptor

Si epitaxy pancake susceptor

Silicon Carbide Epitaxy Susceptor

LED Chip Production

During the extensive coating of the MOCVD reactor, the planetary base or carrier moves the substrate wafer. The performance of the base material has a great influence on the coating quality, which in turn affects the scrap rate of the chip. Semicera’s silicon carbide-coated base increases the manufacturing efficiency of high-quality LED wafers and minimizes wavelength deviation. We also supply additional graphite components for all MOCVD reactors currently in use. We can coat almost any component with a silicon carbide coating, even if the component diameter is up to 1.5M, we can still coat with silicon carbide.

LED epitaxy susceptor

LED 에피 택시 감수기

Semiconductor Field, Oxidation Diffusion Process, Etc.

In the semiconductor process, the oxidation expansion process requires high product purity, and at Semicera we offer custom and CVD coating services for the majority of silicon carbide parts.

The following picture shows the rough-processed silicon carbide slurry of Semicea and the silicon carbide furnace tube that is cleaned in the 1000-level dust-free room. Our workers are working before coating. The purity of our silicon carbide can reach 99.99%, and the purity of sic coating is greater than 99.99995%.

 

Silicon carbide semi-finished product before coating -2

Raw Silicon Carbide Paddle and SiC Process Tube in Cleaing

SiC Tube

Silicon Carbide Wafer Boat CVD SiC Coated

반 시대의 CVD SIC Performace의 데이터.

반 시대 CVD SIC 코팅 데이터

SIC의 순도

세미 케라 작업 장소

Semicera Work Place 2

세미 케라웨어 하우스

장비 기계

CNN 가공, 화학 세정, CVD 코팅

우리의 서비스

뉴 레터

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