Semicera offers a comprehensive range of susceptors and graphite components designed for various epitaxy reactors.Through strategic partnerships with industry-leading OEMs, extensive materials expertise, and advanced manufacturing capabilities, Semicera delivers tailored designs to meet the specific requirements of your application. Our commitment to excellence ensures that you receive optimal solutions for your epitaxy reactor needs.
주요 사양 CVD Sic 코팅
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SIC-CVD 특성 |
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| 결정 구조 | FCC β 상 | |
| 밀도 | g/cm ³ | 3.21 |
| 경도 | 비커스 경도 | 2500 |
| 곡물 크기 | mm | 2~10 |
| 화학적 순도 | % | 99.99995 |
| 열용량 | J · KG-1 · K-1 | 640 |
| 승화 온도 | ℃ | 2700 |
| Felexural 강도 | MPA (RT 4 점) | 415 |
| 영률 | GPA (4pt Bend, 1300 ℃) | 430 |
| 열 팽창 (CTE) | 10-6K-1 | 4.5 |
| 열전도율 | (w/mk) | 300 |
