TaC coating is a new generation of high temperature resistant material, with better high temperature stability than SiC, as a corrosion resistant coating, oxidation resistant coating, wear resistant coating, can be used in the environment above 2000℃, widely used in aerospace ultra-high temperature hot end parts, the third generation of semiconductor single crystal growth and other fields.
Semicera는 다양한 구성 요소 및 캐리어를위한 특수 탄탈 카바이드 (TAC) 코팅을 제공합니다. Semicera Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (흑연 코팅 된 TAC 감수기) 및 주요 반응기 구성 요소의 수명을 연장합니다. 탄탈 럼 탄화물 TAC 코팅을 사용하는 것은 에지 문제를 해결하고 결정 성장의 품질을 향상시키는 것이며, 세미 케어는 획기적인 탄탈 룸 카바이드 코팅 기술 (CVD)을 해결하여 국제 고급 수준에 도달했습니다.
In addition, the service life of Semicera’s TaC coating products is longer and more resistant to high temperature than that of SiC coating. After a long time of laboratory measurement data, our TaC can work for a long time at a maximum of 2300 degrees Celsius. The following are some of our samples:
