Semicera Semiconductor Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics. Our main products include: Silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.The products are mainly used in the semiconductor and photovoltaic industries, such as crystal growth, epitaxy, etching, packaging, coating and diffusion furnace equipment.
Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.
1. 고온 산화 저항:
온도가 1600 C에 이르면 산화 저항은 여전히 매우 좋습니다.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3. 침식 저항 : 높은 경도, 소형 표면, 미세 입자.
4. 부식성 : 산, 알칼리, 소금 및 유기 시약.
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SIC-CVD 특성 |
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| 결정 구조 | FCC β 상 | |
| 밀도 | g/cm ³ | 3.21 |
| 경도 | 비커스 경도 | 2500 |
| 곡물 크기 | mm | 2~10 |
| 화학적 순도 | % | 99.99995 |
| 열용량 | J · KG-1 · K-1 | 640 |
| 승화 온도 | ℃ | 2700 |
| Felexural 강도 | MPA (RT 4 점) | 415 |
| Young’ s Modulus | GPA (4pt Bend, 1300 ℃) | 430 |
| 열 팽창 (CTE) | 10-6K-1 | 4.5 |
| 열전도율 | (w/mk) | 300 |
