Graphite Susceptor with Silicon Carbide Coating Wafer Carrier

Semicera는 다양한 에피 택시 원자로를 위해 설계된 포괄적 인 감수자 및 흑연 구성 요소를 제공합니다. 업계 최고의 OEM, 광범위한 재료 전문 지식 및 고급 제조 기능과의 전략적 파트너십을 통해 Semicera는 애플리케이션의 특정 요구 사항을 충족시키기 위해 맞춤형 설계를 제공합니다. 우수성에 대한 우리의 약속은 에피 택시 원자로 요구에 대한 최적의 솔루션을 받도록 보장합니다.

Description

CVD-SiC coating has the characteristics of uniform structure, compact material, high temperature resistance, oxidation resistance, high purity, acid&alkali resistance and organic reagent, with stable physical and chemical properties.
 Compared with high-purity graphite materials, graphite begins to oxidize at 400C, which will cause a loss of powder due to oxidation, resulting in environmental pollution to peripheral devices and vacuum chambers, and increase impurities of high-purity environment.
 However, SiC coating can maintain physical and chemical stability at 1600 degrees, It is widely used in modern industry, especially in semiconductor industry.

FDVCDV

zcfvzxcvZSXCv

Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer. The SIC formed is firmly bonded to the graphite base, giving the graphite base special properties, thus making the surface of the graphite compact, Porosity-free, high temperature resistance, corrosion resistance and oxidation resistance.

Application

Graphite Susceptor with Silicon Carbide Coating Wafer Carrier插图2

Main Features

1. 고 순도 SIC 코팅 흑연

2. 우수한 내열 및 열 균일 성

3. Fine SiC crystal coated for a smooth surface

4. 화학적 세정에 대한 내구성이 높다

Main Specifications of CVD-SIC Coatings

SiC-CVD
밀도 (g/cc) 3.21
Flexural strength (Mpa) 470
Thermal expansion (10-6/K) 4
열전도율 (w/mk) 300

Packing and Shipping

Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:

Quantity(Pieces) 1 – 1000 >1000
Est. Time(days) 15 To be negotiated

세미 케라 작업 장소

Semicera Work Place 2

장비 기계

CNN 가공, 화학 세정, CVD 코팅

우리의 서비스

뉴 레터

당사와의 연락을 기대합니다