The High Purity Tantalum Carbon Coated Ring from Semicera is essential for epitaxy equipment, withstanding temperatures up to 2300°C. Its exceptional thermal stability and high purity ensure reliable performance in demanding semiconductor manufacturing processes. Semicera’s advanced coating technology guarantees superior durability and efficiency in high-temperature environments.
Semicera는 다양한 구성 요소 및 캐리어를위한 특수 탄탈 카바이드 (TAC) 코팅을 제공합니다. Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Graphite coated TaC susceptor), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
High-purity tantalum carbon coated rings are widely used in special equipment and systems in aerospace, chemical, semiconductor manufacturing and other fields. They are usually used for sealing and transmission in high temperature and corrosive environments, providing reliable performance and long life, ensuring stable operation of equipment and product quality.
The characteristics of high-purity tantalum carbon coated rings are as follows:
1. High temperature stability: High-purity tantalum carbon coated rings can maintain structural stability in high temperature environments and have excellent high temperature resistance, which is suitable for applications that need to withstand high temperature conditions.
2. Corrosion resistance: Tantalum material itself has good corrosion resistance, and the tantalum carbide coating formed on the surface further enhances its corrosion resistance and can resist the erosion of a variety of chemicals and solvents.
3. Wear resistance: Tantalum carbide coating has high hardness and wear resistance, can maintain good performance in friction and wear environments, and extend service life.
4. Excellent sealing performance: High-purity tantalum carbon coated rings have good sealing performance, can effectively prevent gas or liquid leakage, and are suitable for application scenarios with high sealing requirements.
Moreover, Semicera’s TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
