silicon carbide Ceramic effector for the transfer of wafers in various semiconductor processes

The silicon carbide mechanical arm is formed by isostatic pressing process and sintered at high temperature. According to the requirements of the user’s design drawings, the outline size, thickness size and shape can be refined to meet the specific requirements of users.

12

 

 

 

 

 

 

특성과 장점

1.Precise dimensions and thermal stability

2.High specific stiffness and excellent thermal uniformity, long-term use is not easy to bend deformation;

3. 표면이 부드럽고 내마모성이 우수하므로 입자 오염없이 칩을 안전하게 처리합니다.

4.Silicon carbide resistivity in 106-108Ω, non-magnetic, in line with anti-ESD specification requirements; It can prevent the accumulation of static electricity on the surface of the chip

5. 열전 전도도, 낮은 팽창 계수.

 

 

 

 

 

 

Robot Arm Effector

 

 

 

 

 

SiC End Effector

 

 

 

 

 

 

Comparison of SIC ceramic materials

 

 

 

 

 

 

adfvzcvxcd

 

 

 

 

 

 

 

 

 

뉴 레터

당사와의 연락을 기대합니다