Semiconductor Cassette– Protect and transport your wafers with precision using Semicera’s Semiconductor Cassette, designed to ensure optimal safety and efficiency in high-tech manufacturing environments.
Półcesta introduces the Kaseta półprzewodników, an essential tool for the secure and efficient handling of wafers throughout the semiconductor manufacturing process. Engineered with high precision, this cassette ensures that your wafers are safely stored and transported, maintaining their integrity at every stage.
Superior Protection and Durability The Kaseta półprzewodników from Semicera is built to offer maximum protection to your wafers. Constructed from robust, contamination-resistant materials, it shields your wafers from potential damage and contamination, making it an ideal choice for cleanroom environments. The cassette’s design minimizes particulate generation and ensures that wafers remain untouched and secure during handling and transportation.
Enhanced Design for Optimal Performance Semicera’s Kaseta półprzewodników features a meticulously engineered design that provides precise wafer alignment, reducing the risk of misalignment and mechanical damage. The cassette’s slots are perfectly spaced to hold each wafer securely, preventing any movement that could result in scratches or other imperfections.
Versatility and Compatibility The Kaseta półprzewodników is versatile and compatible with various wafer sizes, making it suitable for different stages of semiconductor fabrication. Whether you’re working with standard or custom wafer dimensions, this cassette adapts to your needs, offering flexibility in your manufacturing processes.
Streamlined Handling and Efficiency Designed with the user in mind, the Semicera Semiconductor Cassette is lightweight and easy to handle, allowing for quick and efficient loading and unloading. This ergonomic design not only saves time but also reduces the risk of human error, ensuring smooth operations within your facility.
Meeting Industry Standards Semicera ensures that the Kaseta półprzewodników meets the highest industry standards for quality and reliability. Each cassette undergoes rigorous testing to guarantee that it performs consistently under the demanding conditions of semiconductor manufacturing. This dedication to quality ensures that your wafers are always protected, maintaining the high standards required in the industry.
Rzeczy |
Produkcja |
Badania |
Atrapa |
Parametry kryształów |
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Polityp |
4H |
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Błąd orientacji powierzchni |
4±0.15° |
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Parametry elektryczne |
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Dopant |
azot typu N. |
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Oporność |
0,015-0,025OHM · cm |
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Parametry mechaniczne |
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Średnica |
150,0 ± 0,2 mm |
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Grubość |
350 ± 25 µm |
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Pierwotna płaska orientacja |
[1-100]±5° |
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Pierwotna płaska długość |
47,5 ± 1,5 mm |
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Wtórne mieszkanie |
Nic |
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TTV |
≤5 µm |
≤10 µm |
≤15 µm |
LTV |
≤3 μm (5 mm*5 mm) |
≤5 μm (5 mm*5 mm) |
≤10 μm (5 mm*5 mm) |
Ukłon |
-15 μm ~ 15 μm |
-35 μm ~ 35 μm |
-45 μm ~ 45 μm |
Osnowa |
≤35 µm |
≤45 µm |
≤55 µm |
Chropowatość z przodu (SI-FACE) (AFM) |
RA ≤ 0,2 nm (5 μm*5 μm) |
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Struktura |
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Gęstość mikropipe |
<1 ea/cm2 |
<10 ea/cm2 |
<15 ea/cm2 |
Zanieczyszczenia metalowe |
≤5E10atoms/cm2 |
Na |
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BPD |
≤1500 EA/CM2 |
≤3000 EA/CM2 |
Na |
TSD |
≤500 EA/CM2 |
≤1000 EA/CM2 |
Na |
Jakość z przodu |
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Przód |
Si |
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Wykończenie powierzchni |
SI-FACE CMP |
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Cząsteczki |
≤60ea/wafel (rozmiar ≥0,3 μm) |
Na |
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Zadrapania |
≤5EA/mm. Kumulatywna długość ≤ -diameter |
Skumulowana długość ≤2*średnica |
Na |
Skórka pomarańczowa/doły/plamy/prążki/pęknięcia/zanieczyszczenie |
Nic |
Na |
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Płyty krawędziowe/wkładki/złamanie/sześciokątne płyty |
Nic |
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Obszary politypowe |
Nic |
Obszar skumulowany ≤20% |
Obszar skumulowany ≤30% |
Przednie oznaczenie lasera |
Nic |
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Jakość wstecz |
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Wstecz |
CMP-FACE CMP |
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Zadrapania |
≤5EA/mm, kumulatywna długość ≤2*średnica |
Na |
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Wady tylne (chipsy krawędziowe/wentylatory) |
Nic |
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Chropowatość pleców |
RA ≤ 0,2 nm (5 μm*5 μm) |
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Oznaczenie lasera z tyłu |
1 mm (od górnej krawędzi) |
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Krawędź |
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Krawędź |
Ścięcie |
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Opakowanie |
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Opakowanie |
Epi-gotowe z opakowaniem próżniowym Opakowanie kaseta z wieloma falami |
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*Uwagi : „Na” oznacza, że brak wymienionych elementów, które nie wspomniane elementy mogą zapoznać się z pół-STD. |