Semicera’s MOCVD Substrate Heaters and Heating Elements are engineered to meet the demanding requirements of semiconductor epitaxy processes. Designed for use in MOCVD systems, these components deliver uniform heat distribution, accurate temperature control, and excellent thermal stability, helping to maintain consistent growth conditions across the wafer surface.
Manufactured from high-quality materials and optimized for high-temperature operation, Semicera’s heating solutions offer reliable performance, long service life, and efficient thermal management. They are widely used in the production of semiconductor devices, power electronics, and LED epitaxial wafers, supporting improved process consistency and overall manufacturing efficiency.
Grzeźnik podłoża MOCVD, elementy grzewcze dla MOCVD
Grzejnik grafitu:
The graphite heater components are used in the high temperature furnace with a temperature reached 2200 degree at vacuum environment and 3000 degrees in a deoxidized and inserted gas environment.
1. Uniformity of heating structure.
2. Good electrical conductivity and high electrical load.
3. Corrosion resistance.
4. Inoxidizability.
5. High chemical purity.
6. High mechanical strength.
The advantage is energy efficiency, high value, and low maintenance.
We can produce anti-oxidation and long-life span graphite crucible, graphite mold, and all parts of the graphite heater.
Advantage: High temperature resistance
Application: MOCVD/Vacuum furnace/Hot Zone
Bulk Density:1.68-1.91g/cm3
Flexural strength: 30-46MPa
Oporność: 7-12 μωm
| Specyfikacja techniczna | VET-M3 |
| Gęstość luzem (g/cm3) | 1.68-1.91 |
| Treść popiołu (PPM) | ≤500 |
| Twardość brzegu | ≥45 |
| Oporność specyficzna (μ.ω.m) | ≤12 |
| Siła zginania (MPA) | ≥40 |
| Wytrzymałość na ściskanie (MPA) | ≥70 |
| Max. Wielkość ziarna (μm) | ≤43 |
| Współczynnik rozszerzalności cieplnej mm/° C | ≤4.4*10-6 |
Semicera’s graphite heaters for electric furnaces are manufactured from high-purity graphite materials, offering excellent high-temperature resistance, thermal stability, electrical conductivity, and mechanical strength. Designed for demanding thermal processing environments, these heaters provide efficient and uniform heat generation while maintaining reliable performance under prolonged high-temperature operation. Semicera can manufacture a wide range of graphite heater configurations according to customer drawings and specifications, supporting customized solutions for semiconductor, photovoltaic, vacuum furnace, and heat treatment applications.
Semicera is a supplier of advanced semiconductor ceramics and the only manufacturer in China that can simultaneously provide high-purity silicon carbide ceramic(especially the Recrystallized SiC) and CVD SiC coating. In addition, our company is also committed to ceramic fields such as alumina, aluminum nitride, zirconia, and silicon nitride, etc.
Our main products include: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer boat(Photovoltaic&Semiconductor), silicon carbide furnace tube, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, as well as the CVD SiC coating and TaC coating. The products are mainly used in the semiconductor and photovoltaic industries, such as equipment for crystal growth, epitaxy, etching, packaging, coating, and diffusion furnaces,etc.
Our company has the complete production equipment such as molding, sintering, processing, coating equipment, etc., which can complete all the necessary links of product production and have higher controllability of product quality; The optimal production plan can be selected according to the needs of the product, resulting in lower cost and providing customers with more competitive products; We can flexibly and efficiently schedule production based on order delivery requirements and in conjunction with online order management systems, providing customers with faster and more guaranteed delivery time.
