6-Inch N-Type Silicon Carbide (SiC) Substrate

Semicera supplies a wide range of 4H/6H/8H silicon carbide (SiC) wafers and advanced SiC ceramic components for the semiconductor and photovoltaic industries.

With years of manufacturing and supply experience, we provide stable and reliable products for global customers, especially in high-temperature and high-purity process applications.

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Description

Silicon carbide (SiC) single crystal is a typical third-generation wide bandgap semiconductor material. Compared with traditional silicon (Si), it has a much larger band gap, higher thermal conductivity, higher breakdown electric field, and higher electron saturation velocity. These characteristics make SiC especially suitable for high-power, high-voltage, high-frequency, and high-temperature applications.

Third-generation semiconductor materials mainly include SiC, GaN, and diamond. They are also called wide bandgap materials because their band gap is generally larger than 2.3 eV. Compared with first- and second-generation semiconductors, they perform better under harsh conditions such as high temperature, high voltage, high frequency, and radiation environments. They are widely used in advanced industries such as power electronics, new energy vehicles, communication systems, aerospace, and energy infrastructure.

In many applications, SiC devices can significantly reduce energy loss and improve system efficiency, making them an important material for next-generation power electronics.

Semicera’s Data

Items

Production

Research

Dummy

Crystal Parameters

Polytype

4H

Surface orientation error

<11-20 >4±0.15°

Electrical Parameters

Dopant

n-type Nitrogen

Resistivity

0.015-0.025ohm·cm

Mechanical Parameters

Diameter

150.0±0.2mm

Thickness

350±25 μm

Primary flat orientation

[1-100]±5°

Primary flat length

47.5±1.5mm

Secondary flat

None

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Bow

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Structure

Micropipe density

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metal impurities

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Front Quality

Front

Si

Surface finish

Si-face CMP

Particles

≤60ea/wafer (size≥0.3μm)

NA

Scratches

≤5ea/mm. Cumulative length ≤Diameter

Cumulative length≤2*Diameter

NA

Orange peel/pits/stains/striations/ cracks/contamination

None

NA

Edge chips/indents/fracture/hex plates

None

Polytype areas

None

Cumulative area≤20%

Cumulative area≤30%

Front laser marking

None

Back Quality

Back finish

C-face CMP

Scratches

≤5ea/mm,Cumulative length≤2*Diameter

NA

Back defects (edge chips/indents)

None

Back roughness

Ra≤0.2nm (5μm*5μm)

Back laser marking

1 mm (from top edge)

Edge

Edge

Chamfer

Packaging

Packaging

Epi-ready with vacuum packaging

Multi-wafer cassette packaging

*Notes: “NA” means no request Items not mentioned may refer to SEMI-STD.

Applications

  • Power semiconductor devices
  • New energy vehicles (EV power systems)
  • Fast charging and power modules
  • Renewable energy systems (solar and wind)
  • Industrial power control systems
  • Aerospace and high-reliability electronics

Semicera provides stable, high-quality silicon carbide substrates and epitaxial wafer solutions to support next-generation power semiconductor development, helping customers achieve higher efficiency, reliability, and performance.

SiC wafers

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