Silicon carbide paddle, also known as silicon carbide cantilever paddle, silicon carbide cantilever beam is a kind of silicon carbide ceramic products after 1850℃high temperature sintering, but high temperature sintering silicon carbide ceramic is a special ceramic products, by fine particlesα-SiC and additives pressed into a blank, in contact with liquid silicon at high temperature, carbon in the blank and infiltration of Si reaction, the formation ofβ-SiC, And combined with α-SiC, free silicon filled the porosity, so as to obtain high density ceramic materials; It has various superior properties of industrial ceramics.
Silicon Carbide Cantilever Paddle is a critical load-bearing component used in semiconductor high-temperature process equipment, such as diffusion furnaces, oxidation furnaces, and LPCVD systems. It is designed to carry and transfer wafer boats during thermal processing.
Made from high-purity silicon carbide (SiC), it offers excellent high-temperature stability, creep resistance, and chemical corrosion resistance. Even under extreme conditions (1000–1600°C), it maintains high rigidity and dimensional stability, ensuring consistent wafer processing quality and yield.
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Physical Properties of Recrystallized Silicon Carbide |
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Property |
Typical Value |
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Working temperature (°C) |
1600°C (with oxygen), 1700°C (reducing environment) |
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SiC content |
> 99.96% |
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Free Si content |
< 0.1% |
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Bulk density |
2.60-2.70 g/cm3 |
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Apparent porosity |
< 16% |
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Compression strength |
> 600 MPa |
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Cold bending strength |
80-90 MPa (20°C) |
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Hot bending strength |
90-100 MPa (1400°C) |
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Thermal expansion @1500°C |
4.70 10-6/°C |
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Thermal conductivity @1200°C |
23 W/m•K |
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Elastic modulus |
240 GPa |
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Thermal shock resistance |
Extremely good |
The length of our SiC Cantilever paddle ranges from 1,500 to 3,500 mm. SiC Cantilever paddle’s dimension can be tailored according to the customer’s specification.
