Semicera provides a full portfolio of high-performance susceptors and graphite components for a wide range of epitaxy reactor platforms.
Leveraging strong collaboration with leading equipment manufacturers, deep expertise in advanced materials, and state-of-the-art manufacturing technologies, we develop customized solutions tailored to the unique demands of each application. Our focus on quality, precision, and reliability enables us to support customers with optimized components that enhance epitaxial process performance and operational efficiency.
Our company specializes in providing CVD SiC coating services for graphite, ceramics, and other substrate materials. Through the Chemical Vapor Deposition (CVD) process, silicon- and carbon-containing precursor gases react at elevated temperatures to generate high-purity silicon carbide (SiC). The resulting SiC is uniformly deposited onto the substrate surface, forming a dense and highly protective SiC coating that enhances corrosion resistance, wear resistance, and high-temperature performance.
1. High purity SiC coated graphite, the purity can reach the 99.99995%
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
| SiC-CVD Properties | ||
| Crystal Structure | FCC β phase | |
| Density | g/cm ³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Grain Size | μm | 2~10 |
| Chemical Purity | % | 99.99995 |
| Heat Capacity | J·kg-1 ·K-1 | 640 |
| Sublimation Temperature | ℃ | 2700 |
| Felexural Strength | MPa (RT 4-point) | 415 |
| Young’ s Modulus | Gpa (4pt bend, 1300℃) | 430 |
| Thermal Expansion (C.T.E) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
