Zirconia Loading and Unloading Machine Ceramic Top Plates are high-precision structural platforms used in semiconductor wafer loading and unloading systems. Made from 3Y-PSZ zirconia (ZrO₂), they offer excellent mechanical strength, high fracture toughness, and superior wear resistance. These ceramic top plates ensure stable wafer or FOUP support, high positioning accuracy, and low particle generation, making them ideal for cleanroom automation equipment.
Zirconia is a high-performance ceramic material with excellent mechanical strength and high fracture toughness at room temperature. Semicera’s zirconia (ZrO₂) is stabilized with 3 mol% yttria (3Y-PSZ), which provides a fine and uniform microstructure suitable for high-precision machining.
Due to its small grain size and stable phase structure, 3Y-PSZ zirconia can be processed into complex and high-accuracy components. It is widely used in precision mechanical parts, industrial tools, and high-end engineering applications.
Zirconia also offers excellent wear resistance and impact resistance, making it suitable for demanding operating conditions. Its high toughness allows it to maintain structural stability under mechanical stress, and it is commonly used in precision components, industrial cutting systems, and wear-resistant parts.
In addition, zirconia is widely applied in precision molds, optical connector components, crushing media, and other industrial fields requiring high reliability and long service life.
