Semiconductor Alumina Ceramic Insulating Ring

Description

Semiconductor Ceramic Insulating Ring is a high-purity ceramic component used in semiconductor manufacturing equipment to provide electrical insulation, thermal stability, and contamination control. Manufactured from advanced ceramic materials such as Alumina (Al₂O₃), Zirconia (ZrO₂), or Aluminum Nitride (AlN), it is widely used in plasma etching, CVD, PVD, diffusion, and wafer processing systems.

Main Features

1. Excellent Electrical Insulation: High resistivity and dielectric strength, which prevent current leakage and electrical interference.
2. High Temperature Resistance: Maintains stability under high-temperature conditions, so it is suitable for semiconductor thermal processes.
3. Excellent Chemical Resistance: Resistant to acids, alkalis, and corrosive gases, and it is compatible with plasma and vacuum environments

4. High Mechanical Strength: High hardness, wear resistance, and Long service life.

5. High Purity & Low Particle Generation: It minimizes contamination risk and meets semiconductor cleanroom requirements.

6. Excellent Dimensional Stability: Low thermal expansion coefficient ensures precise positioning and assembly accuracy.        

Semicera’s Technical Data:

Application

Semiconductor Industry

• Plasma Etching Equipment

• CVD/PVD Systems

• Diffusion & Oxidation Furnaces

• Ion Implantation Equipment

• Electrostatic Chuck Assemblies

• Wafer Processing Equipment

Electronics Industry

• Electrical Insulation Components

• High-Voltage Insulation Structures

Industrial Equipment

• Vacuum Systems

• High-Temperature Processing Equipment

• Precision Insulating Components