SiC Coated Susceptor for Deep UV-LED

Semicera Energy Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics. Our main products include: Silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.The products are mainly used in the semiconductor and photovoltaic industries, such as crystal growth, epitaxy, etching, packaging, coating and diffusion furnace equipment.

وصف

Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.

6

UV-LED-1

UV-LED-2

Main Features

1. High temperature oxidation resistance: the oxidation resistance is still very good when the temperature is as high as 1600 C.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3. Erosion resistance: high hardness, compact surface, fine particles.
4. Corrosion resistance: acid, alkali, salt and organic reagents.

Main Specifications of CVD-SIC Coating

خصائص SIC-CVD 
بنية البلورة FCC β المرحلة 
كثافة ز/سم ³  3.21
صلابة فيكرز صلابة 2500
حجم الحبوب مم 2~10
نقاء كيميائي % 99.99995
سعة الحرارة J · KG-1 · K-1 640
درجة حرارة التسامي 2700
قوة فردية MPA (RT 4 نقاط)   415
Young’ s Modulus GPA (4PT BEND ، 1300 ℃) 430
التمدد الحراري (CTE)  10-6K-1 4.5
الموصلية الحرارية (W/MK) 300

مكان عمل semicera 

مكان عمل semicera 2 

آلة المعدات

معالجة CNN ، التنظيف الكيميائي ، طلاء CVD   

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