The Tantalum Carbide Coated Susceptor Support Plate by Semicera is designed for use in silicon carbide epitaxy and crystal growth. It provides stable support in high-temperature, corrosive, or high-pressure environments, essential for these advanced processes. Commonly used in high-pressure reactors, furnace structures, and chemical equipment, it ensures system performance and stability. Semicera’s innovative coating technology guarantees superior quality and reliability for demanding engineering applications.
Tantalum carbide coated susceptor support plate is a susceptor or support structure that is covered with a thin layer of Tantal Carbid. This coating can be formed on the susceptor surface by techniques such as physical vapor deposition (PVD) or chemical vapor deposition (CVD), giving the susceptor the superior properties of Tantal Carbid.
Semicera bietet spezielle Tantal -Carbid -Beschichtungen (TAC) für verschiedene Komponenten und Träger. Das führende Beschichtungsprozess von Semizera ermöglicht Tantal -Carbid (TAC) -Hellbeschichtungen, um eine hohe Reinheit, hohe Temperaturstabilität und hohe chemische Toleranz zu erzielen, die Produktqualität von SIC/GaN -Kristallen und EPI -Schichten zu verbessern (SchichtenGraphitbeschichtete TAC -Suszeptor) und die Lebensdauer von Schlüsselreaktorkomponenten verlängern. Die Verwendung von Tantal -Carbid -TAC -Beschichtung besteht darin, das Edgeproblem zu lösen und die Qualität des Kristallwachstums zu verbessern. Semizera hat den Durchbruch die Tantal -Carbidbeschichtungstechnologie (CVD) durch einen Durchbruch und erreicht das internationale Fortgeschrittenen.
After years of development, Semicera has conquered the technology of CVD TaC with the joint efforts of the R&D department. Defects are easy to occur in the growth process of SiC wafers, but after using TaC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera’ parts for single crystal growth.
The main features of tantalum carbide coated base support plates include:
1. High temperature stability: Tantalum carbide has excellent high temperature stability, making the coated base support plate suitable for support needs in high temperature working environments.
2. Corrosion resistance: Tantalum carbide coating has good corrosion resistance, can resist chemical corrosion and oxidation, and extend the service life of the base.
3. High hardness and wear resistance: The high hardness of tantalum carbide coating gives the base support plate good wear resistance, which is suitable for occasions requiring high wear resistance.
4. Chemical stability: Tantalum carbide has high stability to a variety of chemical substances, making the coated base support plate perform well in some corrosive environments.
Außerdem, Semicera TAC-beschichtete Produkte zeigen eine längere Lebensdauer und einen größeren Widerstand mit hohem Temperatur im Vergleich zu SiC -Beschichtungen. Labormessungen haben gezeigt, dass unsere TAC -Beschichtungen kann bei Temperaturen von bis zu 2300 Grad Celsius für längere Perioden konsequent funktionieren. Im Folgenden finden Sie einige Beispiele für unsere Proben:
