Semicera Semiconductor Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics. Our main products include: Silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, as well as CVD SiC coatings and TaC coatings.The products are mainly used in the semiconductor and photovoltaic industries, such as crystal growth, epitaxy, etching, packaging, coating and diffusion furnace equipment.
Our company provides SiC coating process services by CVD method on the surface of graphite, ceramics and other materials, so that special gases containing carbon and silicon react at high temperature to obtain high purity SiC molecules, molecules deposited on the surface of the coated materials, forming SIC protective layer.
1. High temperature oxidation resistance:
the oxidation resistance is still very good when the temperature is as high as 1600 C.
2. High purity : made by chemical vapor deposition under high temperature chlorination condition.
3. Erosion resistance: high hardness, compact surface, fine particles.
4. Corrosion resistance: acid, alkali, salt and organic reagents.
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SIC-CVD-Eigenschaften |
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| Kristallstruktur | FCC -β -Phase | |
| Dichte | g/cm ³ | 3.21 |
| Härte | Vickers Härte | 2500 |
| Körnung | mm | 2~10 |
| Chemische Reinheit | % | 99.99995 |
| Wärmekapazität | J · kg-1 · k-1 | 640 |
| Sublimationstemperatur | ℃ | 2700 |
| Felexurale Stärke | MPA (RT 4-Punkt) | 415 |
| Young’ s Modulus | GPA (4PT Bend, 1300 ℃) | 430 |
| Wärmeausdehnung (CTE) | 10-6K-1 | 4.5 |
| Wärmeleitfähigkeit | (W/mk) | 300 |
