SiC coated graphite parts for SiC epitaxial equipment.Product introduction and use: SiC epitaxial equipment reaction chamber other parts of the vehicle, controlled temperatureDevice location of the product: in the reaction chamber, not in direct contact with the waferMain downstream products: power devicesMain terminal market: new energy vehicles
SiC Coated Graphite Halfmoon Part is a key component used in semiconductor manufacturing processes, especially for SiC epitaxial equipment. We use our patented technology to make the halfmoon part with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.
