Semicera’s Heating Elements for MOCVD Substrate are engineered to provide precise and stable temperature control in Metal-Organic Chemical Vapor Deposition (MOCVD) processes. Made from high-quality graphite, these heating elements offer exceptional thermal conductivity, uniform heating, and long-term reliability. Ideal for semiconductor manufacturing, LED production, and advanced material applications, Semicera’s heating elements ensure consistent performance, optimizing your MOCVD substrate process for maximum efficiency and quality.
Main features of graphite heater:
1. Gleichmäßigkeit der Heizstruktur.
2. gute elektrische Leitfähigkeit und hohe elektrische Belastung.
3. Korrosionsbeständigkeit.
4. Inoxidizierbarkeit.
5. Hohe chemische Reinheit.
6. Hohe mechanische Festigkeit.
The advantage is energy efficient, high value and low maintenance. We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.
|
Technische Spezifikation |
Semicera-M3 |
|
Schüttdichte (g/cm3) |
≥1.85 |
|
Aschegehalt (PPM) |
≤500 |
|
Küstenhärte |
≥45 |
|
Spezifischer Widerstand (μ.ω.M) |
≤12 |
|
Biegerstärke (MPA) |
≥40 |
|
Druckfestigkeit (MPA) |
≥70 |
|
Max. Korngröße (μm) |
≤43 |
|
Wärmeausdehnungskoeffizient mm/° C |
≤4.4*10-6 |
