Long Service Life SiC Coated Graphite Carrier For Solar Wafer

Silicon carbide is a new type of ceramics with high cost performance and excellent material properties. Due to features like high strength and hardness, high temperature resistance, great thermal conductivity and chemical corrosion resistance, Silicon Carbide can almost withstand all chemical medium. Therefore, SiC are widely used in oil mining, chemical, machinery and airspace, even nuclear energy and the military have their special demands on SIC. Some normal application we can offer are seal rings for pump, valve and protective armor etc.

Advantages

Hochtemperaturoxidationswiderstand
Hervorragende Korrosionsbeständigkeit
Gute Abriebfestigkeit
Hoher Wärmungsleitfähigkeitskoeffizient
Selbstglagen, geringe Dichte
Hohe Härte
Individuelles Design.

HGF (2)

HGF (1)

Anwendungen

-Verschleiß-resistentes Feld: Buchse, Platte, Sandstrahldüse, Zyklonauskleidung, Schleiflauf usw.…
-Hochtemperaturfeld: SIC -Platte, Quenching -Ofenrohr, Strahlungsrohr, Tiegel, Heizelement, Walzen, Strahl, Wärmetauscher, Kaltluftrohr, Brennerdüse, Thermoelenteils -Schutzrohr, SIC -Boot, Kilnauto -Struktur, Setter usw.
-Siliziumcarbid -Halbleiter: SiC -Waferboot, SIC -Chuck, SIC -Paddel, SiC -Kassette, SiC -Diffusionsrohr, Wafergabel, Saugschild, Führungsanleitung usw.
-Siliziumkarbiddichtungsfeld: Alle Arten von Dichtungsring, Lager, Buchse usw.
-Photovoltaikfeld: Ausleger Paddel, Schleiflauf, Siliziumkarbidwalze usw.
-Lithiumbatteriefeld

WAFER (1)

WAFER (2)

Physical Properties Of SiC

Property Wert Method
Density 3.21 g/cc Sink-float and dimension
Specific heat 0.66 J/g °K Pulsed laser flash
Flexural strength 450 MPa560 MPa 4 point bend, RT4 point bend, 1300°
Fracture toughness 2.94 MPa m1/2 Microindentation
Hardness 2800 Vicker’s, 500g load
Elastic ModulusYoung’s Modulus 450 GPa430 GPa 4 pt bend, RT4 pt bend, 1300 °C
Grain size 2 – 10 µm SEM

Thermal Properties Of SiC

Thermal Conductivity 250 W/m °K Laser flash method, RT
Thermal Expansion (CTE) 4.5 x 10-6 °K Room temp to 950 °C, silica dilatometer

Technical Parameters

Item Einheit Data
RBSiC(SiSiC) NBSiC SSiC RSiC OSiC
SiC content % 85 75 99 99.9 ≥99
Free silicon content % 15 0 0 0 0
Max service temperature 1380 1450 1650 1620 1400
Density g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2.75 2.75-2.85
Open porosity % 0 13-15 0 15-18 7-8
Bending strength 20℃ Мpa 250 160 380 100 /
Bending strength 1200℃ Мpa 280 180 400 120 /
Modulus of elasticity 20℃ Gpa 330 580 420 240 /
Modulus of elasticity 1200℃ Gpa 300 / / 200 /
Thermal conductivity 1200℃ W/m.K 45 19.6 100-120 36.6 /
Coefficient of thermal expansion K-1X10-6 4.5 4.7 4.1 4.69 /
HV Kg/mm2 2115 / 2800 / /

The CVD silicon carbide coating on the outer surface of recrystallized silicon carbide ceramic products can reach a purity of more than 99.9999% to meet the needs of customers in the semiconductor industry.

SEMICERA -Arbeitsplatz

Semizelle Arbeitsplatz 2

Ausrüstungsmaschine

CNN -Verarbeitung, chemische Reinigung, CVD -Beschichtung

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