Mit Siliziumkarbid beschichtete Graphitheizung

Semicera is a leading supplier specializing in wafer and advanced semiconductor consumables. We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing, photovoltaic industry and other related fields.Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs.

Main features of graphite heater:

1. Gleichmäßigkeit der Heizstruktur.

2. gute elektrische Leitfähigkeit und hohe elektrische Belastung.

3. Korrosionsbeständigkeit.

4. Inoxidizierbarkeit.

5. Hohe chemische Reinheit.

6. Hohe mechanische Festigkeit.

The advantage is energy efficient, high value and low maintenance. We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.

Graphite heater (1)(1)

Hauptparameter der Graphitheizung

Technische Spezifikation

VET-M3

Schüttdichte (g/cm3)

≥1.85

Aschegehalt (PPM)

≤500

Küstenhärte

≥45

Spezifischer Widerstand (μ.ω.M)

≤12

Biegerstärke (MPA)

≥40

Druckfestigkeit (MPA)

≥70

Max. Korngröße (μm)

≤43

Wärmeausdehnungskoeffizient mm/° C

≤4.4*10-6

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