High-Temperature SiC Coating Graphite Wafer Susceptor for MOCVD Epitaxial Growth

Product Applications

1. Semiconductor Manufacturing

   • Ideal for epitaxial deposition of GaN, SiC, and III-V compound semiconductors.

   • Critical for producing high-performance LEDs, RF devices, and power electronics.

2. Research & Development

   • Trusted by labs for advanced material studies and next-gen semiconductor prototyping.

3. Industrial MOCVD Systems

   • Compatible with leading MOCVD equipment for mass production of optoelectronic components.

Key Advantages

1. Unmatched Durability

   • SiC coating enhances resistance to thermal shock, chemical corrosion, and mechanical wear, extending service life by 3x compared to traditional graphite susceptors.

2. Superior Thermal Uniformity

   • Engineered for ±1.5% temperature uniformity across the wafer surface, minimizing defects in deposited layers.

3. High-Temperature Stability

   • Operates seamlessly at temperatures up to 1,800°C, maintaining structural integrity in harsh MOCVD environments.

4. Cost Efficiency

   • Reduces downtime and replacement costs thanks to prolonged durability and consistent performance.

Product Features

1. Premium Material Composition

   • Combines high-purity isostatic graphite with a dense, defect-free SiC coating for optimal thermal and chemical resistance.

2. Customizable Designs

   • Available in tailored geometries (e.g., pancake, vertical, horizontal) to fit diverse reactor configurations.

3. Precision Engineering

   • Ultra-smooth surface finish (<0.5 µm Ra) ensures minimal particle contamination during deposition.

4. Rapid Thermal Response

   • Low thermal mass design accelerates heating/cooling cycles, boosting process efficiency.

Why Choose Semicera?

• Industry Expertise: Backed by 15+ years of experience in advanced ceramic solutions for semiconductor applications.

• Quality Assurance: Rigorous testing under ISO-certified protocols guarantees performance consistency.

• Global Support: Dedicated technical team available for custom solutions and rapid delivery.