Silicon Carbide (SiC) Wafer Susceptors for MOCVD

Silicon Carbide (SiC) wafer susceptor is one of the key components used in the Metal Organic Chemical Vapor Deposition (MOCVD) process. Its main role is to monitor and control key parameters in the MOCVD process to ensure the growth quality and uniformity of the thin film.

Description

그만큼 Silicon Carbide (SiC) Wafer Susceptors for MOCVD from semicera are designed for advanced epitaxial processes, offering superior performance for both Si Epitaxy and SiC Epitaxy applications. Semicera’s innovative approach ensures these susceptors are durable and efficient, providing stability and precision for critical manufacturing operations.

Engineered to support the intricate needs of MOCVD Susceptor systems, these products are versatile, compatible with carriers like PSS Etching Carrier, ICP Etching Carrier, and RTP Carrier. Their flexibility makes them suitable for high-tech industries, including those working with LED Epitaxial Susceptor and Monocrystalline Silicon.

With multiple configurations, including Barrel Susceptor and Pancake Susceptor, these wafer susceptors are also essential in the photovoltaic sector, supporting Photovoltaic Parts manufacturing. For semiconductor manufacturers, the capability to handle GaN on SiC Epitaxy processes makes these susceptors highly valuable for ensuring high-quality output across a wide range of applications.

 

Main Features

1. 고 순도 SIC 코팅 흑연

2. 우수한 내열 및 열 균일 성

3. 좋아 SIC 크리스탈 코팅 매끄러운 표면을 위해

4. 화학적 세정에 대한 내구성이 높다

 

Main Specifications of CVD-SIC Coatings:

SiC-CVD
밀도 (g/cc) 3.21
Flexural strength (Mpa) 470
Thermal expansion (10-6/K) 4
열전도율 (w/mk) 300

Packing and Shipping

Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:

Quantity(Pieces)

1-1000

>1000

 Est. Time(days) 30 To be negotiated

세미 케라 작업 장소

Semicera Work Place 2

장비 기계

CNN 가공, 화학 세정, CVD 코팅

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